Maximised large area etching and deposition production solutions
Vacuum load lock as standard with cluster capability options
The LED industry justifiably demands high throughput, device quality and lower cost of ownership. The PlasmaPro 1000 offers all these solutions.
The PlasmaPro 1000 tools provide outstanding benefits for LED manufacturers
490mm electrode - Unparalleled throughput from industry leading batch sizes of up to 7 x 6” wafers
Reliable hardware and ease of serviceability - Excellent uptime
Maximised clamping - Enhanced wafer cooling
Z-movement electrode - Ultimate uniformity
Dual entry gas inlet - Easy process tuning
Unique carrier plate design - Efficient cooling of every wafer with minimal edge exclusion while being easy to use and maintain
High-conductance radial (axial symmetric) pumping configuration - Guaranteed enhanced process uniformity and rates are
Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.
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