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| PECVD | RIE | ICP | Ion Beam |
CVD |
ALD | |||||
| PlasmaPro 800 | PlasmaPro 100 | PlasmaPro 80 | PlasmaPro 800 | PlasmaPro 100 | PlasmaPro 80 | PlasmaPro 100 | Ionfab | Nanofab | FlexAL | |
| Advanced Energy Paramount Generator | ✓ | ✓ | ✓ | |||||||
| Anti-Contamination Shield | ✓ | |||||||||
| Automatic Endpoint Detectors | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | |
| Automatic Pressure Control | ✓ | ✓ | ✓ | ✓ | ✓ | |||||
| Barcode Reader Wafer Scanning Software | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
| Comdel Generator | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | |||
| Dual CM Gauge Switching | ✓ | ✓ | ✓ | ✓ | ||||||
| Gas Pod | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
| Glassman Power Supply | ✓ | |||||||||
| Hiden HMT RGA | ✓ | |||||||||
| Integrated Gas Pod | ✓ | |||||||||
| Light Tower | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
| LN2 Autochangeover Unit | ✓ | |||||||||
| Logviewer Software | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
| PTIQ Software | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | |||
| Rapid Cooling and CDA Electrode Temperature Control | ✓ | ✓ | ||||||||
| SECS GEM Automation | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
| Soft Pump | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
| TeamViewer Software | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
| TEOS Liquid Level Sensing | ✓ | ✓ | ✓ | ✓ | ||||||
| Vacuum Capacitor AMU | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
| Wide Temperature Range Electrode | ✓ | ✓ | ✓ | ✓ | ✓ | |||||
| Windows 10 Upgrade | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
| X20 Control System | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | |
Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.
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