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UPGRADES
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  2. Service & Support
  3. Upgrades

UPGRADES BY SYSTEM

We offer a range of system upgrades that both extend the life of your system and add new functionality.

PlasmaPro Systems ALD Systems Ion Beam Systems
80 800 100 1000 FlexAL OpAL Ionfab300 Nanofab
Advanced Energy Paramount Generator X
Automatic Pressure Control X X
Barcode Reader Wafer Scanning Software X X X X X X X X
Comdel Generator X X X
Dual CM Gauge Switching X X
Gas Pod X X X X X X X X
Glassman Power Supply X
Hiden HMT RGA X
Integrated Gas Pod X
Light Tower X X X X X X X X
LN2 Autochangeover Unit X
Logviewer Software X X X X X X X
Optical End Point Detectors X X X X X X
SECS GEM Automation X X X X X X X X
Soft Pump X X X
TeamViewer Software X X X X X X X X
TEOS Liquid Level Sensing X X
Turbomolecular Vacuum Pump X X X X X X X
Wide Temperature Range Electrode X
X20 Control System X X X X X
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GLOBAL CUSTOMER SUPPORT

Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.

  • Remote diagnostics software provides quick and easy fault diagnosis and resolution.
  • Support contracts are available to suit the budget and situation.
  • Global spares in strategic locations for quick response.
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