Part of the Oxford Instruments Group
Expand
Oxford Instruments
Applications
Products
News
Events
Contact
SustainabilityInvestorsCareersNewsEventsContact
Investors Careers
About Us
Our FacilityNewsEventsSolutions for ProductionSolutions for Research
Markets
2D MaterialsAugmented RealityBiomedical DevicesFailure Analysis
HBLEDsInfrared SensorsLasersVCSELs
MEMS & SensorsPower DevicesQuantum TechnologyRF Devices
Technologies
Plasma EtchingReactive Ion EtchingRIE-PEICP Etching
Ion Beam
IBDIBE
Plasma deposition
PECVDICPCVDCVD
Atomic scale
Atomic Layer DepositionAtomic Layer EtchingAtomic Scale Processing
Materials & ProcessesSiCSiO2Al2O3CrAlGaN/GaNBrowse more...
Products
ICP EtchPlasmaPro 80 ICPPlasmaPro 100 CobraPlasmaPro 100 PolarisRIEPlasmaPro 80 RIEPlasmaPro 100 RIEPlasmaPro 800 RIE
Deep Si Etch
PlasmaPro 100 Estrelas
PECVDPlasmaPro 80 PECVDPlasmaPro 100 PECVDPlasmaPro 800 PECVDICPCVDPlasmaPro 80 ICPCVDPlasmaPro 100 ICPCVDCVDPlasmaPro 100 Nano
ALDAtomfabFlexAL
ALE
PlasmaPro 100 ALE
Ion Beam
Ionfab IBEIonfab IBD
PTIQ Advert
Library
BlogProcess NewsVideosWebinarsWhite PapersCustomer Gallery
Support
Service & Support
Service AgreementsUpgrades & SoftwareNEW: PTIQ SoftwareSparesTrainingTeamviewer
Raise a Support Ticket
Contact Us
PTIQ
Contact Us
Shop
UKEurope
News
Events
Contact
eCommerce
Service & Support
Upgrades
  1. Home
  2. Service & Support
  3. Upgrades

Available Upgrades

PlasmaPro Systems Ion Beam
 CVD
 ALD
80 800 100 1000 Ionfab 300 Nanofab FlexAL
Advanced Energy Paramount Generator ✓
Automatic Pressure Control ✓
Barcode Reader Wafer Scanning Software ✓ ✓ ✓ ✓ ✓ ✓ ✓
Comdel Generator ✓ ✓ ✓
Dual CM Gauge Switching ✓ ✓
Gas Pod ✓ ✓ ✓ ✓ ✓ ✓ ✓
Glassman Power Supply ✓
Hiden HMT RGA ✓
Integrated Gas Pod ✓
Light Tower ✓ ✓ ✓ ✓ ✓ ✓ ✓
LN2 Autochangeover Unit ✓
Logviewer Software ✓ ✓ ✓ ✓ ✓ ✓
Optical End Point Detectors ✓ ✓ ✓ ✓ ✓
PTIQ Software ✓ ✓ ✓ ✓
SECS GEM Automation ✓ ✓ ✓ ✓ ✓ ✓ ✓
Soft Pump ✓ ✓ ✓
TeamViewer Software ✓ ✓ ✓ ✓ ✓ ✓ ✓
TEOS Liquid Level Sensing ✓ ✓
Turbomolecular Vacuum Pump ✓ ✓ ✓ ✓ ✓ ✓
Wide Temperature Range Electrode ✓
X20 Control System ✓ ✓ ✓ ✓ ✓
CONTACT US
REQUEST PRICING

NEW

Introducing... PTIQ Software

PTIQ is the latest intelligent software solution for PlasmaPro and Atomfab processing equipment.

  • Exceptional level of responsive system control
  • Optimise system and process performance
  • Different levels of software to suit your requirements
  • Brand new intuitive layout and design
EXPLORE PTIQ
PTIQ

Global Customer Support

Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.

  • Remote diagnostics software provides quick and easy fault diagnosis and resolution.
  • Support contracts are available to suit the budget and situation.
  • Global spares in strategic locations for quick response.
FIND OUT MORE

© Oxford Instruments 2020

Website by Miramar Communications Ltd