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Upgrades

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Benefits of Upgrades

Our Upgrades portfolio offers a range of features and benefits designed to optimise or enhance your system’s capabilities, manage obsolescence, save money and other costs. Upgrades can boost productivity, reduce the cost of ownership and maintenance, as well as enhance system automation and control. Click here to find out more about Benefits of Upgrades.

Available Upgrades

PECVD RIE ICP Ion Beam
 CVD
 ALD
PlasmaPro 800 PlasmaPro 100 PlasmaPro 80 PlasmaPro 800 PlasmaPro 100 PlasmaPro 80 PlasmaPro 100 Ionfab Nanofab FlexAL
Advanced Energy Paramount Generator ✓ ✓ ✓
Anti-Contamination Shield ✓
Automatic Endpoint Detectors ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
Automatic Pressure Control ✓ ✓ ✓ ✓ ✓
Barcode Reader Wafer Scanning Software ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
Comdel Generator ✓ ✓ ✓ ✓ ✓ ✓ ✓
Dual CM Gauge Switching ✓ ✓ ✓ ✓
Gas Pod ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
Glassman Power Supply ✓
Hiden HMT RGA ✓
Integrated Gas Pod ✓
Light Tower ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
LN2 Autochangeover Unit ✓
Logviewer Software ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
OEM Obsolescence ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
PTIQ Software ✓ ✓ ✓ ✓ ✓ ✓ ✓
Rapid Cooling and CDA Electrode Temperature Control ✓ ✓
SECS GEM Automation ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
Soft Pump ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
TeamViewer Software ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
TEOS Liquid Level Sensing ✓ ✓ ✓ ✓
Vacuum Capacitor AMU ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
Wide Temperature Range Electrode ✓ ✓ ✓ ✓ ✓
Windows 10 Upgrade ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
X20 Control System ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
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NEW

Introducing... PTIQ Software

PTIQ is the latest intelligent software solution for PlasmaPro and Atomfab processing equipment.

  • Exceptional level of responsive system control
  • Optimise system and process performance
  • Different levels of software to suit your requirements
  • Brand new intuitive layout and design
EXPLORE PTIQ
PTIQ

Global Customer Support

Oxford Instruments is committed to providing comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of the tool.

  • Remote diagnostics software provides quick & easy fault diagnosis & resolution
  • Support agreements are available to suit the budget and situation
  • Global spares in strategic locations for quick response
  • Global service engineers provide preventative maintenance service & support
  • A wide range of upgrades, for process improvements, greater productivity & reduced cost of ownership of your tool are available
LEARN MORE

Related content

FAQs | Upgrades

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