Part of the Oxford Instruments Group
Expand
Oxford Instruments
Applications
Products
News
Events
Contact
InvestorsCareersNewsEventsContacteCommerce
Investors Careers
About Us
Our FacilityNewsEventsSolutions for ProductionSolutions for Research
Introducing Atomfab
Markets
2D materialsBiomedical DevicesFailure Analysis
HBLEDsInfrared sensorsLasersVCSELs
MEMS & SensorsPower DevicesQuantum Information ProcessingRF Devices
Introducing Atomfab
Technologies
Plasma EtchingReactive Ion EtchingRIE-PEICP Etching
Ion Beam
IBDIBE
Plasma deposition
PECVDICPCVDCVD
Atomic scale
Atomic Layer DepositionAtomic Layer EtchingAtomic Scale Processing
Introducing Atomfab
Materials
1D materials2D materialsAl2O3AlGaN-GaNAlNa-SiCrCo
DiamondDLCGaSbGaAs/AlGaAsGaNGaPHfNHfO2
InP/InGaAs/InAlAsInSbNbNNiPMMAPtSiSiC
SiGeSiNxSiO2Ta2O5TiO2VOxZnOMore materials...
Products
ICPPlasmaPro 80 ICPPlasmaPro 100 CobraPlasmaPro 100 PolarisRIEPlasmaPro 80 RIEPlasmaPro 100 RIEPlasmaPro 800 RIE
Deep Si Etch
PlasmaPro 100 Estrelas
PECVDPlasmaPro 80 PECVDPlasmaPro 100 PECVDPlasmaPro 800 PECVDPlasmaPro 1000 StratumICPCVDPlasmaPro 80 ICPCVDPlasmaPro 100 ICPCVD
ALDAtomfabFlexAL
ALE
PlasmaPro 100 ALE
Ion Beam
Ionfab 300 IBEIonfab 300 IBD
Nanoscale Growth
Nanofab
Introducing Atomfab
Library
BlogProcess NewsVideosWebinarsWhite PapersCustomer Gallery
Introducing Atomfab
Support
Service & Support
Support ContractsUpgrades & SoftwareSparesTrainingTeamviewerWarranty Options
Raise a Support Ticket
Contact Us
Contact Us
News
Events
Contact
eCommerce
SUPPORT
UPGRADES
  1. Home
  2. Service & Support
  3. Upgrades

UPGRADES BY SYSTEM

We offer a range of system upgrades that both extend the life of your system and add new functionality.

PlasmaPro Systems Ion Beam
 CVD
 ALD
80 800 100 1000 Ionfab 300 Nanofab FlexAL
Advanced Energy Paramount Generator X
Automatic Pressure Control X
Barcode Reader Wafer Scanning Software X X X X X X X
Comdel Generator X X X
Dual CM Gauge Switching X X
Gas Pod X X X X X X X
Glassman Power Supply X
Hiden HMT RGA X
Integrated Gas Pod X
Light Tower X X X X X X X
LN2 Autochangeover Unit X
Logviewer Software X X X X X X
Optical End Point Detectors X X X X X
SECS GEM Automation X X X X X X X
Soft Pump X X X
TeamViewer Software X X X X X X X
TEOS Liquid Level Sensing X X
Turbomolecular Vacuum Pump X X X X X X
Wide Temperature Range Electrode X
X20 Control System X X X X X
CONTACT US
REQUEST PRICING

GLOBAL CUSTOMER SUPPORT

Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.

  • Remote diagnostics software provides quick and easy fault diagnosis and resolution.
  • Support contracts are available to suit the budget and situation.
  • Global spares in strategic locations for quick response.
FIND OUT MORE

© Oxford Instruments 2019

Website by Miramar Communications Ltd