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PlasmaPro Systems | Ion Beam |
CVD |
ALD | |||
80 | 800 | 100 | Ionfab 300 | Nanofab | FlexAL | |
Advanced Energy Paramount Generator | ✓ | |||||
Automatic Pressure Control | ✓ | |||||
Barcode Reader Wafer Scanning Software | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
Comdel Generator | ✓ | ✓ | ✓ | |||
Dual CM Gauge Switching | ✓ | ✓ | ||||
Gas Pod | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
Glassman Power Supply | ✓ | |||||
Hiden HMT RGA | ✓ | |||||
Integrated Gas Pod | ✓ | |||||
Light Tower | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
LN2 Autochangeover Unit | ✓ | |||||
Logviewer Software | ✓ | ✓ | ✓ | ✓ | ✓ | |
Optical End Point Detectors | ✓ | ✓ | ✓ | ✓ | ✓ | |
PTIQ Software | ✓ | ✓ | ✓ | |||
SECS GEM Automation | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
Soft Pump | ✓ | ✓ | ✓ | |||
TeamViewer Software | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
TEOS Liquid Level Sensing | ✓ | ✓ | ||||
Turbomolecular Vacuum Pump | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
Wide Temperature Range Electrode | ✓ | |||||
X20 Control System | ✓ | ✓ | ✓ | ✓ | ✓ |
Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.