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Service & Support
Upgrades

Available Upgrades

PECVD RIE ICP Ion Beam
CVD
ALD
PlasmaPro 800 PlasmaPro 100 PlasmaPro 80 PlasmaPro 800 PlasmaPro 100 PlasmaPro 80 PlasmaPro 100 Ionfab Nanofab FlexAL
Advanced Energy Paramount Generator
Anti-Contamination Shield
Automatic Pressure Control
Barcode Reader Wafer Scanning Software
Comdel Generator
Dual CM Gauge Switching
Gas Pod
Glassman Power Supply
Hiden HMT RGA
Integrated Gas Pod
Light Tower
LN2 Autochangeover Unit
Logviewer Software
PTIQ Software
SECS GEM Automation
Soft Pump
TeamViewer Software
TEOS Liquid Level Sensing
Vacuum Capacitor AMU
Wide Temperature Range Electrode
Windows 10 Upgrade
X20 Control System
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NEW

Introducing... PTIQ Software

PTIQ is the latest intelligent software solution for PlasmaPro and Atomfab processing equipment.

  • Exceptional level of responsive system control
  • Optimise system and process performance
  • Different levels of software to suit your requirements
  • Brand new intuitive layout and design
EXPLORE PTIQ
PTIQ

Global Customer Support

Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.

  • Remote diagnostics software provides quick and easy fault diagnosis and resolution.
  • Support contracts are available to suit the budget and situation.
  • Global spares in strategic locations for quick response.
FIND OUT MORE