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Service & Support

Upgrades

Benefits of Upgrades

Our Upgrades portfolio offers a range of features and benefits designed to optimise or enhance your system’s capabilities, manage obsolescence, save money and other costs. Upgrades can boost productivity, reduce the cost of ownership and maintenance, as well as enhance system automation and control. Click here to find out more about Benefits of Upgrades.


Available Upgrades

Process Improvement

Upgrades aimed at improving processesing capabilities, including improved repeatibility, stability, or yield, or the introduction of expanded process capabilities.

Obsolescence

Upgrades aimed at replacing OEM parts declared obsolete by manufacturers, often involving the introduction of latest design innovations.

Software

Upgrades offering PTIQ, our flagship system control software, and/or a SECS/GEM-compliant interface.


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Global Customer Support

Oxford Instruments is committed to providing comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of the tool.

  • Remote diagnostics software provides quick & easy fault diagnosis & resolution
  • Support agreements are available to suit the budget and situation
  • Global spares in strategic locations for quick response
  • Global service engineers provide preventative maintenance service & support
  • A wide range of upgrades, for process improvements, greater productivity & reduced cost of ownership of your tool are available

Related content

Introducing... PTIQ Software

PTIQ is the latest intelligent software solution for PlasmaPro and Atomfab processing equipment.

  • Exceptional level of responsive system control
  • Optimise system and process performance
  • Different levels of software to suit your requirements
  • Brand new intuitive layout and design
EXPLORE PTIQ
PTIQ

Available Upgrades

PECVD RIE ICP Ion Beam
CVD
ALD
PlasmaPro 800 PlasmaPro 100 PlasmaPro 80 PlasmaPro 800 PlasmaPro 100 PlasmaPro 80 PlasmaPro 100 Ionfab Nanofab FlexAL
Advanced Energy Paramount Generator
Anti-Contamination Shield
Automatic Endpoint Detectors
Automatic Pressure Control
Comdel Generator
Dual CM Gauge Switching
Gas Pod
Integrated Gas Pod
Light Tower
LN2 Autochangeover Unit
Logviewer Software
OEM Obsolescence
PTIQ Software
SECS GEM Automation
Soft Pump
Vacuum Capacitor AMU
Wide Temperature Range Electrode
Windows 10 Upgrade
X20 Control System