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Available Upgrades

PECVD RIE ICP Ion Beam
 CVD
 ALD
PlasmaPro 800 PlasmaPro 100 PlasmaPro 80 PlasmaPro 800 PlasmaPro 100 PlasmaPro 80 PlasmaPro 100 Ionfab Nanofab FlexAL
Advanced Energy Paramount Generator ✓ ✓ ✓
Anti-Contamination Shield ✓
Automatic Pressure Control ✓ ✓ ✓ ✓ ✓
Barcode Reader Wafer Scanning Software ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
Comdel Generator ✓ ✓ ✓ ✓ ✓ ✓ ✓
Dual CM Gauge Switching ✓ ✓ ✓ ✓
Gas Pod ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
Glassman Power Supply ✓
Hiden HMT RGA ✓
Integrated Gas Pod ✓
Light Tower ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
LN2 Autochangeover Unit ✓
Logviewer Software ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
PTIQ Software ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
SECS GEM Automation ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
Soft Pump ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
TeamViewer Software ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
TEOS Liquid Level Sensing ✓ ✓ ✓ ✓
Vacuum Capacitor AMU ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
Wide Temperature Range Electrode ✓ ✓ ✓ ✓ ✓
Windows 10 Upgrade ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
X20 Control System ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
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NEW

Introducing... PTIQ Software

PTIQ is the latest intelligent software solution for PlasmaPro and Atomfab processing equipment.

  • Exceptional level of responsive system control
  • Optimise system and process performance
  • Different levels of software to suit your requirements
  • Brand new intuitive layout and design
EXPLORE PTIQ
PTIQ

Global Customer Support

Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.

  • Remote diagnostics software provides quick and easy fault diagnosis and resolution.
  • Support contracts are available to suit the budget and situation.
  • Global spares in strategic locations for quick response.
FIND OUT MORE

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