PECVD | RIE | ICP | Ion Beam |
CVD |
ALD | |||||
PlasmaPro 800 | PlasmaPro 100 | PlasmaPro 80 | PlasmaPro 800 | PlasmaPro 100 | PlasmaPro 80 | PlasmaPro 100 | Ionfab | Nanofab | FlexAL | |
Advanced Energy Paramount Generator | ✓ | ✓ | ✓ | |||||||
Anti-Contamination Shield | ✓ | |||||||||
Automatic Endpoint Detectors | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | |
Automatic Pressure Control | ✓ | ✓ | ✓ | ✓ | ✓ | |||||
Barcode Reader Wafer Scanning Software | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
Comdel Generator | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | |||
Dual CM Gauge Switching | ✓ | ✓ | ✓ | ✓ | ||||||
Gas Pod | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
Glassman Power Supply | ✓ | |||||||||
Hiden HMT RGA | ✓ | |||||||||
Integrated Gas Pod | ✓ | |||||||||
Light Tower | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
LN2 Autochangeover Unit | ✓ | |||||||||
Logviewer Software | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
PTIQ Software | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | |||
Rapid Cooling and CDA Electrode Temperature Control | ✓ | ✓ | ||||||||
SECS GEM Automation | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
Soft Pump | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
TeamViewer Software | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
TEOS Liquid Level Sensing | ✓ | ✓ | ✓ | ✓ | ||||||
Vacuum Capacitor AMU | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
Wide Temperature Range Electrode | ✓ | ✓ | ✓ | ✓ | ✓ | |||||
Windows 10 Upgrade | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
X20 Control System | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.