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Service & Support
Upgrades

Available Upgrades

PlasmaPro Systems Ion Beam
CVD
ALD
80 800 100 1000 Ionfab 300 Nanofab FlexAL
Advanced Energy Paramount Generator
Automatic Pressure Control
Barcode Reader Wafer Scanning Software
Comdel Generator
Dual CM Gauge Switching
Gas Pod
Glassman Power Supply
Hiden HMT RGA
Integrated Gas Pod
Light Tower
LN2 Autochangeover Unit
Logviewer Software
Optical End Point Detectors
PTIQ Software
SECS GEM Automation
Soft Pump
TeamViewer Software
TEOS Liquid Level Sensing
Turbomolecular Vacuum Pump
Wide Temperature Range Electrode
X20 Control System
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NEW

Introducing... PTIQ Software

PTIQ is the latest intelligent software solution for PlasmaPro and Atomfab processing equipment.

  • Exceptional level of responsive system control
  • Optimise system and process performance
  • Different levels of software to suit your requirements
  • Brand new intuitive layout and design
EXPLORE PTIQ
PTIQ

Global Customer Support

Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.

  • Remote diagnostics software provides quick and easy fault diagnosis and resolution.
  • Support contracts are available to suit the budget and situation.
  • Global spares in strategic locations for quick response.
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