Part of the Oxford Instruments Group
Process solutions for

HBLED Applications

Production process systems for HBLED manufacture offering exceptional single wafer and batch wafer capability

Oxford Instruments offers a unique family of process solutions for high brightness LED production, ensuring the highest possible throughput at key points in the production process. Supplying plasma etch and PECVD tools to HBLED manufacturers for over 17 years, we know how to deliver the cost of ownership and device performance your company needs.

Our Solutions

Oxford Instruments has a wide range of processing equipment suitable for LED devices.

  • PECVD passivation achieves excellent breakdown voltage for optimal device performance
  • GaN etch for LEDs or lasers. GaN etch maintains surface quality and low damage
  • High etch rates for tough to etch materials
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