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Process solutions for
Biomedical Devices

Semiconductor fabrication technology for BioMEMS devices

The global healthcare industry is witnessing a paradigm shift due to the demand for quick and accurate diagnostics as well as the ever-increasing requirements of speed and efficiency in biomedical research.  Advances in semiconductor fabrication technology are enabling devices that are helping in the understanding, discovery and treatment of disease to make healthcare more affordable and efficient, both in and out of the clinic.

Biomedical devices are a class of miniaturized electronic devices that are assembled by integration of various components that present processing challenges. Oxford Instruments offer a wide range of fabrication solutions that include:


MEMS based etch and deposition processes for control of low volumes fluids.

  • Deep Silicon Etch and Cryogenic Etch
  • Glass and polymer etch
  • Thin film (PE) ALD and (PE) CVD coatings
  • Plasma bonding and de-scum
  • Plasma surface modification

Microfluidic components for biomedical applications image

Active Devices

Novel electronic and photonic structures for sensing and drug delivery.

  • Etching of silicon glass quartz and polymers
  • Thin film (PE) ALD and (PE) CVD coatings
  • Advanced materials such as Graphene, Nanowires, 2D materials
  • Etch and deposition processes for Membranes and Cantilever-based devices for applications such as DNA sequencing

Hermetic/Biocompatible Coatings

Protection of devices and its environment.

  • Thin film (PE) ALD and (PE) CVD coatings
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BioMEMS Technology

Where MEMS are overwhelmingly manufactured in Si, BioMEMS also use polymers, glass and ceramics as the base material. Modification of surfaces for biomedical assays and biocompatibility has emerged as a complex science. They may be used in vivo or in vitro (either in or outside of a living body) they can be standalone devices but are usually integrated with other components to perform one or more functions, they have been referred to as “Lab on a chip”.

Biomedical microfluidic filter SEM silicon etch
Biomedical microfluidic filter SEM silicon etch

SEM images of microfluidic filters fabricated using Oxford Instruments silicon etch processing solutions.

Find out more about our silicon etching processes.

Biomedical Systems