MEMS based etch and deposition processes for control of low volumes fluids.
Novel electronic and photonic structures for sensing and drug delivery.
Where MEMS are overwhelmingly manufactured in Si, BioMEMS also use polymers, glass and ceramics as the base material. Modification of surfaces for biomedical assays and biocompatibility has emerged as a complex science. They may be used in vivo or in vitro (either in or outside of a living body) they can be standalone devices but are usually integrated with other components to perform one or more functions, they have been referred to as “Lab on a chip”.
Semiconductor technology is becoming increasingly important in global healthcare enabling novel understanding, discovery and treatment of disease to make healthcare more affordable and efficient, both in and out of the clinic.