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White Papers
1. AUGMENTED REALITY
2. QUANTUM
3. LASERS
4. BIOMEDICAL
5. POWER & ENERGY
6. FAILURE ANALYSIS
AUGMENTED REALITY
Profile Control for Slanted Etching
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Large Area Slanted Etching for Augmented Reality Applications
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QUANTUM
Making Better Diamond and SiC Quantum Devices
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Surface Engineering for High Performance Qubits
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Atomic Layer Deposition for Quantum Devices
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Non-destructive electrical characterisation of plasma atomic layer deposited TiN on 200 mm wafers using THz spectroscopy
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LASERS
Front end plasma solutions for InP‑based Lasers and Photodiodes
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Advanced Endpoint Control Techniques for VCSEL Mesa Manufacture
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High yield manufacturing of mesas in GaAs based VCSELs
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Dry Etching of High Power VCSEL Array
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InP laser diode device production: Defining the mesa
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InP laser diode device production: Plasma deposition for maximum performance
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InP laser diode device production: DFB Grating Etch for maximum performance
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BIOMEDICAL
Device fabrication for life sciences & biomedical applications: Barrier & biocompatible coatings
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Device fabrication for life sciences & biomedical applications: Electric, Photonic and MEMS based devices
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Device fabrication for life sciences & biomedical applications: Creation of hydrophobic, hydrophilic
and functional surfaces
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Device fabrication for life sciences & biomedical applications: Microfluidics components fabrication
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POWER & ENERGY
Enabling reliable normally-off recessed gate MISHEMT fabrication for power electronics applications
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Plasma Polish: High Specification SiC Surface Preparation
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Atomic Layer Deposition and Atomic Layer Etching for GaN Power Electronics
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World-Leading Plasma Process Solutions for Manufacturing SiC Power Devices
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Atomic Layer Deposition (ALD): Towards Stable and Efficient Perovskite Solar Cells
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Plasma Processing: The Essential Steps for High Performance GaN on SiC RF Devices
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FAILURE ANALYSIS
Productive & precise: The application of plasma processing techniques in failure analysis
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Part of the Oxford Instruments Group
Part of the Oxford Instruments Group
