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Process solutions for

MEMS & Sensors

MEMS is enabling a new generation of detectors allowing efficient measurement in for example motion sensing and medical diagnosis

Micro/Nano Electro Mechanical Systems (M/NEMS) and Sensors have become well established with multiple devices being used in consumer and commercial products. This includes smartphones, automotive, games consoles, navigation aids, drones, and biomedical devices. This is set to increase as the Internet of Things (IoT) matures beyond its current capabilities.

MEMS Technology

With the increased demands for energy efficient, smaller and cost effective devices, a comprehensive selection of fabrication requirements is essential. Oxford Instruments offers a unique range of flexible equipment and process solutions to meet these challenges, which include deep silicon etch, ICP, PECVD, ALD, nanoscale growth and ion beam etch and deposition.

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