Part of the Oxford Instruments Group
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Process solutions for
Device Production

Global Presence in Semiconductor Device Production

Oxford Instruments is a supplier of world-class plasma etch and deposition process solutions into the semiconductor market. Our systems are used by many of the world leading compound semiconductor companies, reliably producing thousands of high-performance devices day in day out.

Oxford Instruments’ experience in supplying process solutions to the production market worldwide has given us one of the strongest libraries of processes and capabilities in the world. With our knowledge, we are able to deliver the advanced, stable solutions you need to maximise your device performance.