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VCSEL Manufacturing Solutions

VCSELs (Vertical-Cavity Surface-Emitting Lasers) are currently going through a wave of success with 3D sensing applications. Our VCSEL device manufacturing solutions support excellent electro-optical performance at maximum yield.

  • Non-selective GaAs/AlGaAs etch with smooth sidewalls and no notching at individual layers
  • PECVDICP Etching and RIE for masking, passivation, mesa or isolation
  • Highly precise mesa etching depth achieved by ultra-low footing process and fully automated endpoint control

Reliably Manufacturing VCSELs

Simplified process flow. Orange processes show solutions covered by Oxford Instruments' technology.

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A Proven Process

At Oxford Instruments Plasma Technology, one of our great successes has been in mesa manufacturing for VCSELs. We have repeatedly demonstrated high precision manufacturing of VCSEL mesas from masking to etching of the mesa on 150mm wafers, with devices passing accelerated lifetime testing.

Mesas are etched uniformly and smoothly with extra-low footing. The process is assisted by fully automated endpoint detection which enables fine control on mesa height.

Our VCSEL solutions support excellent electro-optical performance at maximum yield. Using our strong expertise in plasma processing, we enable VCSEL manufacturers to produce high volumes of lasers at high quality. Our current solutions are production proven on substrates up to 150mm and are all 200mm substrate compatible.

VCSEL Applications

VCSELs enable technologies such as 3D sensing, gesture recognition, and LIDAR for autonomous (self-driving) vehicles. Face recognition, powered by 3D sensing, has been adopted by several high-end smartphone manufacturers and opened a path for multiple new applications. These applications are now driving a shift from low-power to high-power operation for VCSELs.

VCSELs are used as an infra-red light emitter to illuminate the object to sense. They make ideal light sources for this application because of their unique device properties, including low beam divergence, temperature stability and low power consumption.

Our VCSEL solutions achieve excellent uniformity for maximum device performance.

Plasma Processing Systems for VCSELs

Advanced plasma processing solutions can be achieved through our PlasmaPro 100 platform, which has been configured for high volume manufacturing up to 200mm wafer size.

Our PECVD and ICP-RIE solutions include various steps such as masking, passivation, mesa or isolation. Oxford Instruments has a long history of working closely with the Compound Semiconductor community to deliver maximum device performance and manufacturing efficiency.

From high power conversion efficiency in 3D sensing to high stability in data communications, we deliver the manufacturing process to achieve target performances.


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