Part of the Oxford Instruments Group
Expand
Oxford Instruments
Applications
Products
News
Events
Contact
InvestorsCareersNewsEventsContacteCommerce
Investors Careers
About Us
Our FacilityNewsEventsSolutions for ProductionSolutions for Research
Introducing Atomfab
Markets
2D MaterialsAugmented RealityBiomedical DevicesFailure Analysis
HBLEDsInfrared SensorsLasersVCSELs
MEMS & SensorsPower DevicesQuantum TechnologyRF Devices
Introducing Atomfab
Technologies
Plasma EtchingReactive Ion EtchingRIE-PEICP Etching
Ion Beam
IBDIBE
Plasma deposition
PECVDICPCVDCVD
Atomic scale
Atomic Layer DepositionAtomic Layer EtchingAtomic Scale Processing
Introducing Atomfab
Processes
1D materials2D materialsAl2O3AlGaN-GaNAlNa-SiCrCo
DiamondDLCGaSbGaAs/AlGaAsGaNGaPHfNHfO2
InP/InGaAs/InAlAsInSbNbNNiPMMAPtSiSiC
SiGeSiNxSiO2Ta2O5TiO2VOxZnOMore materials...
Products
ICPPlasmaPro 80 ICPPlasmaPro 100 CobraPlasmaPro 100 PolarisRIEPlasmaPro 80 RIEPlasmaPro 100 RIEPlasmaPro 800 RIE
Deep Si Etch
PlasmaPro 100 Estrelas
PECVDPlasmaPro 80 PECVDPlasmaPro 100 PECVDPlasmaPro 800 PECVDPlasmaPro 1000 StratumICPCVDPlasmaPro 80 ICPCVDPlasmaPro 100 ICPCVD
ALDAtomfabFlexAL
ALE
PlasmaPro 100 ALE
Ion Beam
Ionfab 300 IBEIonfab 300 IBD
Nanoscale Growth
PlasmaPro 100 Nano
Introducing Atomfab
Library
BlogProcess NewsVideosWebinarsWhite PapersCustomer Gallery
Introducing Atomfab
Support
Service & Support
Support ContractsUpgrades & SoftwareSparesTrainingTeamviewerWarranty Options
Raise a Support Ticket
Contact Us
Contact Us
News
Events
Contact
eCommerce
SUPPORT
SERVICE & SUPPORT
  1. Home
  2. Service & Support

GLOBAL SERVICE AND SUPPORT

We're committed to providing comprehensive, flexible and reliable global customer support for all customers. Browse our service and support options below or contact us for more information.

Raise a ticket with our customer support team and we will contact you as soon as possible.

CONTACT SUPPORT
Take a look at our Standard, Comprehensive, and Total Care Contracts available for all customers, tailored for your needs.

SUPPORT CONTRACTS
We offer a range of system upgrades that both extend the life of your system and add new functionality.

UPGRADES
Browse and order high-quality OEM parts for your system.

SPARES
We offer a comprehensive programme of intermediate and advanced level maintenance courses, taking place at our UK headquarters.

TRAINING
Take a look at our Standard, Comprehensive and Total Care warranty contracts.

WARRANTY

GLOBAL CUSTOMER SUPPORT

Oxford Instruments is committed to providing comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of the tool.

  • Remote diagnostics software provides quick & easy fault diagnosis & resolution
  • Support contracts are available to suit the budget and situation
  • Global spares in strategic locations for quick response
  • Global service engineers provide preventative maintenance service &
    support
  • A wide range of upgrades, for process improvements, greater productivity & reduced cost of ownership of your tool are available
CONTACT US

FIND SUPPORT NEAR YOU

Search

Or use my current location Find

Search Results

© Oxford Instruments 2020

Website by Miramar Communications Ltd