Part of the Oxford Instruments Group
Expand
Oxford Instruments
Applications
Products
News
Events
Contact
SustainabilityInvestorsCareersNewsEventsContact
Investors Careers
About Us
Our FacilityNewsEventsSolutions for ProductionSolutions for ResearchSustainability
Applications
2D MaterialsAugmented RealityBiomedical DevicesFailure AnalysisHBLEDs
MEMS & SensorsInfrared SensorsLasersMicro-LEDs
Power DevicesQuantum TechnologyRF DevicesVCSELs
Technologies
Plasma EtchingReactive Ion EtchingRIE-PEICP RIE EtchingDeep Reactive Ion Etching
Ion Beam
Ion Beam DepositionIon Beam Etching
Plasma deposition
PECVDICPCVDCVD
Atomic scale
Atomic Layer DepositionAtomic Layer EtchingAtomic Scale Processing
Materials & ProcessesSiCSiO2Al2O3CrAlGaN/GaNBrowse more...
Products
ICP RIE EtchPlasmaPro 80 ICPPlasmaPro 100 Cobra ICPPlasmaPro 100 Polaris ICPRIEPlasmaPro 80 RIEPlasmaPro 100 RIEPlasmaPro 800 RIE
Deep Si Etch
PlasmaPro 100 Estrelas DSiE
PECVDPlasmaPro 80 PECVDPlasmaPro 100 PECVDPlasmaPro 800 PECVDICPCVDPlasmaPro 80 ICPCVDPlasmaPro 100 ICPCVDCVDPlasmaPro 100 Nano CVD
ALDAtomfab ALDFlexAL ALD
ALE
PlasmaPro 100 ALE
Ion Beam
Ionfab IBEIonfab IBD
Software
PTIQ Software
Colour Centres Quantum White Paper - Oxford Instruments
Library
BlogProcess NewsVideosWebinarsWhite PapersCustomer GalleryCustomers' Publication
Support
Service & Support
Service AgreementsUpgrades & SoftwarePTIQ SoftwareSparesTeamviewer
Training CoursesBasic Training CoursesIntermediate Level CoursesAdvanced Level CoursesStandalone Training Modules
Raise a Support Ticket
Contact Us
Oxford Instruments - TSIA STAR Awards Finalist
Contact Us
Shop
UKEuropeUS & CanadaAsiaJapan
News
Events
Contact
eCommerce
Support
Service & Support
  1. Home
  2. Service & Support

Global Support & Services

We're committed to providing comprehensive, flexible and reliable global customer support for all customers. Browse our service and support options below or contact us for more information. We also have a live chat feature (limited hours) so you can speak to our Support team directly.

Raise a ticket with our customer support team and we will contact you as soon as possible.

Contact Us
Take a look at our Self Sufficiency, Priority Support and Production Critical global service agreement packages.

Service Agreements
We offer a range of system upgrades that both extend the life of your system and add new functionality.

Upgrades
Browse and order high-quality OEM parts for your system.

Spares
We offer a comprehensive programme of intermediate and advanced level maintenance courses, taking place at our UK headquarters.

Training
Take a look at our Self Sufficiency, Priority Support and Production Critical warranty agreements packages.

Warranty

COVID-19: Online Short Courses & Training

Our Service team remain available to our customers and, where local regulations or risk assessment prevent a service person from physically visiting a site, we can help by utilising our remote toolkits.

We're offering a range of free short online courses to help you navigate during and after the COVID-19 outbreak period.

FIND OUT MORE

Global Customer Support

Oxford Instruments is committed to providing comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of the tool.

  • Remote diagnostics software provides quick & easy fault diagnosis & resolution
  • Support contracts are available to suit the budget and situation
  • Global spares in strategic locations for quick response
  • Global service engineers provide preventative maintenance service &
    support
  • A wide range of upgrades, for process improvements, greater productivity & reduced cost of ownership of your tool are available
CONTACT US

Find Support Near You

Search

Or use my current location Find

Search Results

© Oxford Instruments 2021

Website by Miramar Communications Ltd