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Our Customers' Research
Publications Database

We are proud of the ground-breaking R&D our customers are doing on our systems and we want to spread the word of their work. 

Our customer's research has a huge contribution towards technological advancements that positively impact many disciplines from novel optoelectronics and quantum technologies to advanced materials. 

If you like to send us your published research, please complete the form and submit your abstract, including how the Oxford Instruments deposition or etch system has been used in the course of your work.

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Our Customers' Published Research

Creation of regular arrays of faceted AlN nanostructures via a combined top-down, bottom-up approach - R.Armstrong, P-M.Coulon, P.Bozinakis, R.W.Martin, P.A.Shields

High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology - H. Veltkamp, Y. Zhao, M. J. de Boer, R. G. P. Sanders, R. J. Wiegerink and J. C. Lötters

Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2 - Karsten Arts, Harvey Thepass, Marcel A. Verheijen, Riikka L. Puurunen, Wilhelmus M. M. Kessels, Harm C. M. Knoops