Part of the Oxford Instruments Group
Expand
Oxford Instruments
Applications
Products
News
Events
Contact
InvestorsCareersNewsEventsContacteCommerce
Investors Careers
About Us
Our FacilityNewsEventsSolutions for ProductionSolutions for Research
Introducing Atomfab
Markets
2D MaterialsAugmented RealityBiomedical DevicesFailure Analysis
HBLEDsInfrared SensorsLasersVCSELs
MEMS & SensorsPower DevicesQuantum TechnologyRF Devices
Introducing Atomfab
Technologies
Plasma EtchingReactive Ion EtchingRIE-PEICP Etching
Ion Beam
IBDIBE
Plasma deposition
PECVDICPCVDCVD
Atomic scale
Atomic Layer DepositionAtomic Layer EtchingAtomic Scale Processing
Introducing Atomfab
Processes
1D materials2D materialsAl2O3AlGaN-GaNAlNa-SiCrCo
DiamondDLCGaSbGaAs/AlGaAsGaNGaPHfNHfO2
InP/InGaAs/InAlAsInSbNbNNiPMMAPtSiSiC
SiGeSiNxSiO2Ta2O5TiO2VOxZnOMore materials...
Products
ICPPlasmaPro 80 ICPPlasmaPro 100 CobraPlasmaPro 100 PolarisRIEPlasmaPro 80 RIEPlasmaPro 100 RIEPlasmaPro 800 RIE
Deep Si Etch
PlasmaPro 100 Estrelas
PECVDPlasmaPro 80 PECVDPlasmaPro 100 PECVDPlasmaPro 800 PECVDPlasmaPro 1000 StratumICPCVDPlasmaPro 80 ICPCVDPlasmaPro 100 ICPCVD
ALDAtomfabFlexAL
ALE
PlasmaPro 100 ALE
Ion Beam
Ionfab IBEIonfab IBD
Nanoscale Growth
PlasmaPro 100 Nano
Introducing Atomfab
Library
BlogProcess NewsVideosWebinarsWhite PapersCustomer Gallery
Introducing Atomfab
Support
Service & Support
Service AgreementsUpgrades & SoftwareSparesTrainingTeamviewerWarranty Options
Raise a Support Ticket
Contact Us
Contact Us
News
Events
Contact
eCommerce
  1. Home
  2. Products
  3. ICPCVD

ICP CVD Systems

The ICPCVD process module is designed to produce high quality films at low growth temperatures, enabled through high-density remote plasmas that achieves superior film quality with low substrate damage.

Products

This ICPCVD process module is designed to produce high quality films at low growth temperatures, enabled through high-density remote plasmas that achieves superior film quality with…

PlasmaPro 100 ICPCVD

Find out more

The PlasmaPro 80 is a compact, small footprint system offering versatile etch and deposition solutions with convenient open loading. It is easy to site and easy to use, with no compromise…

PlasmaPro 80 ICPCVD

Find out more

© Oxford Instruments 2020

Website by Miramar Communications Ltd