Part of the Oxford Instruments Group

Introducing... PTIQ

PTIQ is the latest intelligent software solution for PlasmaPro and Atomfab processing equipment.

  • Exceptional level of responsive system control
  • Optimise system and process performance
  • User-friendly design

Intelligent Software. Powerful Solutions.

PTIQ is the latest intelligent software solution for Plasma Technology systems. It provides an exceptional level of system control with powerful scheduling and insightful reporting tools, that unlock new possibilities for improved processing efficiency and dynamic workflows. PTIQ Software optimises system and process performance in the Lab and Fab, with different levels of software available to suit facility requirements.

NOTE: We are experiencing a bug issue with the PTIQ software. This issue is limited to a very specific type of recipe editing, so most customers will not encounter the issue. Please click here to help you debug the issue.


The Benefits of Using PTIQ

User-friendly Design

  • ‘At a glance’ design makes information and control more accessible with the minimum of clicks, for maximum user productivity
  • System components can be represented at a high level for process engineers, or by LabView-style functional diagrams for maintenance engineers to better understand the system architecture
  • High contrast colour scheme designed for use in typical yellow light manufacturing environments
  • Designed with touchscreen use in mind, as requested by our users

Operational Readiness & Accuracy

  • Visual indicators of system process readiness help the user avoid operational issues earlier, for better process results. Derived from in-house expertise of best practice, they assist users at all levels of experience
  • Compare results of recipe runs to ensure reliable, repeated processes over time, before/after events e.g., cleaning and for accelerated process development
  • Millisecond accuracy and 1000-point logging for improved data interrogation
PTIQ screen layout

PTIQ Screen Layout 

Flexibility & Reliability

  • Compliance to the SEMI 95 human interface standard provides a familiar experience for your operators and engineers, so they can get up and running more quickly
  • Customisable for error-free, multi-user operation in any cleanroom environment



  • Recipes in editable format as our process data-sheets, for error-free and ease of use
  • Recipes in private mode for increased security in multi-user environments
  • Runs are linked to specific recipe versions, for improved traceability
  • Recipes include standard checks, such as for leak up rates and MFC fill rate, enabling verification of performance before wafer processing, thus automating interventions for increased efficiency
  • Tolerance values can now be defined per-step, enabling more refined control over your process

Permissions & Scheduling

  • Device operation linked to user accounts, for secure use
  • Configuration options (e.g. pressure units, batch options) linked to user accounts, to fine-tune the user experience for increased productivity
  • The powerful scheduling enables overlapped chamber operation with wafer transfers (including wafer lift, electrostatic clamping, wafer preheating), for increased throughput

Software Options

SECS/GEM Factory Host Connection

A software module that connects the Oxford equipment over a SECS/GEM link to a factory host controller for use in an automated
semiconductor fab.


PTIQ AnalytIQs is a set of analytical tools to maximise the uptime of the system, to allow deeper understanding and interpretation of process logged data through the statistical analysis of data. They further extend the PTIQ LogViewer for the tracking and analysis of all system parameters.


On the Roadmap

AnalytIQs Pro

Premium module to measure, analyse and report on the data captured whilst processing.


A set of engineer analysis tools that are essential for self-maintained systems and troubleshooting drills down to the heart of the electronics to control the equipment. These are the same tools available to Oxford Instruments customer support engineers.

PTIQ Backup

This premium module is responsible for periodic backup of recipes, configuration and process run data to a remote computer.

This can be for archival purposes or to transpose the data ready for external processing as required.

Upgrading from PCx

If you currently run a system with PC2000 or PC4500, and want to upgrade to PTIQ, we have several upgrade paths available. On completion of the upgrade, you will automatically enrolled in the Oxford Instruments Software Assurance Agreement.

We also have site-wide PTIQ Upgrade plans; you can upgrade your whole site for a discounted rate to ensure continuity of software support going forward.

Debugging in PTIQ

We are experiencing a bug issue that has been identified with the PTIQ control software. The issue affects all versions of PTIQ up to and including 2021.13.02. This issue is limited to a very specific type of recipe editing (using sub-steps within a recipe step) so most customers will not encounter the issue. Please click here to help you debug the issue.

PTIQ Software Demo

We are so confident in our new software, we want you to see it in action! Our live demo webinar is now available to view on-demand

You'll find out about the benefits of PTIQ and what it can do for you.


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