Introducing... PTIQ

PTIQ is the latest intelligent software solution for PlasmaPro and Atomfab processing equipment.

Exceptional level of responsive system control
Optimise system and process performance
User-friendly design

Intelligent Software. Powerful Solutions.

PTIQ is the latest intelligent software solution for Plasma Technology systems. It provides an exceptional level of system control with powerful scheduling and insightful reporting tools, that unlock new possibilities for improved processing efficiency and dynamic workflows. PTIQ Software optimises system and process performance in the Lab and Fab, with different levels of software available to suit facility requirements.

WATCH DEMO

The Benefits of Using PTIQ

User-friendly Design

‘At a glance’ design makes information and control more accessible with the minimum of clicks, for maximum user productivity
System components can be represented at a high level for process engineers, or by LabView-style functional diagrams for maintenance engineers to better understand the system architecture
High contrast colour scheme designed for use in typical yellow light manufacturing environments
Designed with touchscreen use in mind, as requested by our users

Operational Readiness & Accuracy

Visual indicators of system process readiness help the user avoid operational issues earlier, for better process results. Derived from in-house expertise of best practice, they assist users at all levels of experience
Compare results of recipe runs to ensure reliable, repeated processes over time, before/after events e.g., cleaning and for accelerated process development
Millisecond accuracy and 1000-point logging for improved data interrogation

PTIQ Screen Layout

Flexibility & Reliability

Compliance to the SEMI 95 human interface standard provides a familiar experience for your operators and engineers, so they can get up and running more quickly
Customisable for error-free, multi-user operation in any cleanroom environment

Features

Recipes

Recipes in editable format as our process data-sheets, for error-free and ease of use
Recipes in private mode for increased security in multi-user environments
Runs are linked to specific recipe versions, for improved traceability
Recipes include standard checks, such as for leak up rates and MFC fill rate, enabling verification of performance before wafer processing, thus automating interventions for increased efficiency
Tolerance values can now be defined per-step, enabling more refined control over your process

Permissions & Scheduling

Device operation linked to user accounts, for secure use
Configuration options (e.g. pressure units, batch options) linked to user accounts, to fine-tune the user experience for increased productivity
The powerful scheduling enables overlapped chamber operation with wafer transfers (including wafer lift, electrostatic clamping, wafer preheating), for increased throughput

Upgrading from PCx

If you currently run a system with PC2000 or PC4500, and want to upgrade to PTIQ, we have several upgrade paths available.

We also have site-wide PTIQ Upgrade plans; you can upgrade your whole site for a discounted rate to ensure continuity of software support going forward.

WHY UPGRADE