Part of the Oxford Instruments Group

Introducing... PTIQ

PTIQ is the latest intelligent software solution for PlasmaPro and Atomfab processing equipment.

  • Exceptional level of responsive system control
  • Optimise system and process performance
  • Different levels of software to suit your requirements
  • Brand new intuitive layout and design

Intelligent Software. Powerful Solutions.

PTIQ is the latest software innovation for utilising Plasma Technology systems. Introduced to replace the PCx series of software applications, its modern design and powerful feature-set greatly improves the user/ownership experience, and the all-new architecture provides a solid foundation for all future development. 

As support (coverage) for systems/hardware is increased, and new functionality is added, PTIQ will increasingly represent a core value proposition of Plasma Technology products.


What are the benefits?

  • SEMI E95 compliant to facilitate rapid and error-free process setup
  • Flexible batch scheduler allowing throughput optimisation
  • Customisable for error-free, multi-user operation in any cleanroom environment
  • Recipe editor matching Oxford Instruments’ process datasheets for easy, error-free transfer of recipes
  • Market leading graphical user interface (GUI) to make understanding and controlling Oxford Instruments systems easier than ever before
  • Instant access to tolerance, pre-sets and configuration making servicing systems easier than ever before
  • Single page system and recipe overviews
  • Recipe privacy settings for multiuser facilities
  • Millisecond accuracy and 1000 point logging for improved data interrogation
PTIQ screen layout

PTIQ Screen Layout


Software Options


PTIQ AnalytIQs is a set of analytical tools to maximise the uptime of the system, to allow deeper understanding and interpretation of process logged data through the statistical analysis of data. They further extend the PTIQ LogViewer for the tracking and analysis of all system parameters.


AnalytIQs Pro

Premium module to measure, analyse and report on the data captured whilst processing.



A set of engineer analysis tools that are essential for self-maintained systems and troubleshooting drills down to the heart of the electronics to control the equipment. These are the same tools available to Oxford Instruments customer support engineers.


SECS/GEM Factory Host Connection

A software module that connects the Oxford equipment over a SECS/GEM link to a factory host controller for use in an automated
semiconductor fab.


PTIQ Backup

This premium module is responsible for periodic backup of recipes, configuration and process run data to a remote computer.

This can be for archival purposes or to transpose the data ready for external processing as required.


Upgrading to PTIQ

If you currently run a system with PC2000 or PC4500, and want to upgrade to PTIQ, we have several upgrade paths available. On completion of the upgrade, you will automatically enrolled in the Oxford Instruments Software Assurance Agreement.

We also have site-wide PTIQ Upgrade plans; you can upgrade your whole site for a discounted rate to ensure continuity of software support going forward.


When is this available?

PTIQ is available now.

Since February 2020, systems have been quoted, are being built, and leaving the factory with PTIQ. At present, around 75% of our product line is utilising PTIQ, meaning PlasmaPro 100, 80, and 800 are currently set up for the new software. Our new ATOMFAB system also includes PTIQ.

Before the end of the year, it will be made available on our Ionfab, Estrelas and Polaris systems.

What are the hardware upgrades that we need to have to be able to upgrade to PTIQ?

This will be evaluated case-by-case, but there are some minimum specifications we need for PTIQ to work on an existing set of hardware:

  • 1080p widescreen monitor
  • Relatively new PLC (internal compute module inside the process chamber: an X20 variety and specifically a 1584 module that has the larger memory. This is typical of most systems installed within the last 2 years).
  • Some minor ancillary modules (e.g. Profibus module)
  • At least 8GB of computer memory

If I have an etch system and a deposition system, will it be the same software and work the same way?

Yes. This was an important goal for the new software to give a consistent look and feel and to find the common actions needed to operate all our systems.

There will be a few notable differences, but they relate to the specific technologies involved. This means that, whether the modules exist on the same cluster configuration or are side by side as two separate single module tools, the software will be the exact same.

Does this work with cluster systems?

We support our three families of products with PTIQ: open-load, single module and our cluster systems. All three types of system have the same look and feel and operate in a similar manner.

Is PTIQ touch screen compatible?

We have designed the software with the view that it will be controlled via a touchscreen, ensuring that with a 24” touchscreen that the active areas will be at least 1cm square. Although the SEMI E95 standard is no longer active, it does still serve a purpose in helping to make a touchscreen operator interface for Semiconductor Capital Equipment.

Is PTIQ multi-monitor compatible?

This is on our short-term roadmap. We built the software from the ground up with dual monitor support from the beginning, but this is not yet available to be activated in the software as this feature needs a little more work before it is complete.

With existing PC4500 software, LogViewer log files can be viewed on another PC if manually transferred to another PC. It would useful if remote users could more easily access data files and analyse it. What will the new software offer?

We will soon be packaging the Datalog viewer as a standalone product so that it may be installed on a separate PC. We are looking to make the process of transferring files much easier.

Can a parameter (e.g. RF) be graded from start and end value through a loop?

This feature is in the process of being developed as we seak to support the more advanced deep silicon etch processes. Our implementation will be available for all process modules when it is released, not only the Estrelas tool.

Do you have a simulator of this software that we can install in our personal computer for testing or training?

We have a simulator/emulator that can be used for this purpose. For example, it does a very good job of emulating the hardware including some simple algorithms to emulate the physics involved in pressure control.

PTIQ Software Demo

We are so confident in our new software, we want you to see it in action! Our live demo webinar is now available to view on-demand

You'll find out about the benefits of PTIQ and what it can do for you.


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