PTIQ Software

Frequently Asked Question | PTIQ Software

Q: If I have an etch system and a deposition system, will it be the same software and work the same way?

A: Yes! This was an important goal for the new software to give a consistent look and feel and to find the common actions needed to operate all our systems. There will be a few notable differences, but they relate to the specific technologies involved. This means that, whether the modules exist on the same cluster configuration or are side by side as two separate single module tools, the software will be the exact same.

Q: If I upgrade to PTIQ, can I transfer PC4500 recipes?

A: Yes! Your PC4500 recipes can be transferred to PTIQ using the Recipe Converter feature.

Q: Can recipes be written and edited offline?

A: Yes! The PTIQ Desktop Assistant allows full offline recipe creation and editing.

Q: Do you have a simulator of this software that we can install in our personal computer for testing or training?

A: Yes! We have a simulator/emulator that can be used for this purpose. For example, it does a very good job of emulating the hardware including some simple algorithms to emulate the physics involved in pressure control.

Q: Does PTIQ work with cluster systems?

A: Yes! PTIQ supports our three product families: open-load, single module and cluster systems. All three system types feel and look the same and operate in a similar manner.

Q: Is PTIQ multi-monitor compatible?

A: Yes! We built the software from the ground up with dual monitor support.

Q: Can process logs be read offline?

A: Yes! Using the wizard in the Alarms tab, you can save the runs you’re interested in. The PTIQ Desktop Assistant also supports reading process logs offline.

Q: Can I export process logs in other formats and can this process be automated?

A: Yes! PTIQ offers multiple export formats along with automated export options in the Settings menu.

Q: Where is Service mode?

A: PTIQ provides direct device‑level control for users with the appropriate privileges. Integrated software interlocks ensure system safety by preventing actions that could cause equipment damage.

Q: Is PTIQ touch screen compatible?

A: Yes! We designed the software so that it can be controlled via a touchscreen, ensuring that with a 24” touchscreen the active areas will be at least 1cm square. Although the SEMI E95 standard is no longer active, it does still serve a purpose in helping to make a touchscreen operator interface for Semiconductor Capital Equipment.

Q: Can the screen background colour be changed?

A: Yes! PTIQ includes a customisable background colour option, available in the Settings tab.

Find out more about Oxford Instruments Plasma Technology's PTIQ Software on the page.