SECS/GEM Software

'GEM' is a standard that builds upon a series of existing 'SECS' standards to define a means to coordinate/automate 'equipment' in a manufacturing (process) environment ('factory'), by means of a 'host'. These standards are colloquially referred to as 'SECS/GEM'.

How we work with SECS/GEM

As a provider of semiconductor manufacturing equipment, we offer a SECS/GEM-compliant interface for our system control software (PTIQ, PCx) with documentation to support your integration efforts.

Oxford Instruments Plasma Technology systems are controlled from a PC running either:

PTIQ – our latest, modern software platform
A member of our older PCx family of software

Whether the system is run by PTIQ or PCx, we can configure the software to provide a SECS/GEM interface.

Documentation

We provide technical documentation of the interface, which is needed by your SECS/GEM integrator. It complements, and requires, knowledge of how to operate the Oxford Instruments Plasma Technology system.

Integration support

We can provide fixed-duration support for your integration development efforts. On-site and remote-only options are available.

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Capabilities of SECS/GEM

Data collection. Enable the host to monitor equipment activity:

Event reporting. Inform the host when significant ‘collection’ events occur on the equipment, such as completion of wafer transfer
Trace data reporting. Send data samples periodically from equipment to host
Limit monitoring. Inform the host when a data variable on the equipment exceeds defined limits
Reports. Define what data to include in event reporting

Establish communications. Establish equipment-host communications following system initialization or loss of communications
Spooling. Buffer (on the equipment) messages intended for the host during communication failure and deliver when communication is restored

Remote control. Provide the host with limited control over equipment operations such as START, and ABORT
Alarm management. Notify the host and manage alarm conditions on the equipment
Equipment constants. Enable the host to define operational settings on the equipment
Process recipe management. Enable the host to manage process recipes on the equipment
Equipment terminal services. Enable the host to display text messages on the equipment UI and vice-versa
Error messages. Provide this host with descriptions of equipment errors
Clock. Enable the host to read and update the system clock of the equipment
Control. Enable the host (or user) to configure the equipment's control-related behavior

Architecture of SECS/GEM

The standards are defined by the Semiconductor Equipment and Materials International (SEMI) industry association.

Model layer

SEMI E30 - Specification for the Generic Model for Communications and Control of Manufacturing Equipment
Defines how SECS-II is used in semiconductor manufacturing equipment, including equipment { functions, states, information }.
Comprises a common set of requirements applicable to all equipment types, and type-specific extended requirements.