'GEM' is a standard that builds upon a series of existing 'SECS' standards to define a means to coordinate/automate 'equipment' in a manufacturing (process) environment ('factory'), by means of a 'host'. These standards are colloquially referred to as 'SECS/GEM'.
As a provider of semiconductor manufacturing equipment, we offer a SECS/GEM-compliant interface for our system control software (PTIQ, PCx) with documentation to support your integration efforts.
Oxford Instruments Plasma Technology systems are controlled from a PC running either:
Whether the system is run by PTIQ or PCx, we can configure the software to provide a SECS/GEM interface.
We provide technical documentation of the interface, which is needed by your SECS/GEM integrator. It complements, and requires, knowledge of how to operate the Oxford Instruments Plasma Technology system.
We can provide fixed-duration support for your integration development efforts. On-site and remote-only options are available.REQUEST A QUOTE
The standards are defined by the Semiconductor Equipment and Materials International (SEMI) industry association.