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SECS/GEM Software

'GEM' is a standard that builds upon a series of existing 'SECS' standards to define a means to coordinate/automate 'equipment' in a manufacturing (process) environment ('factory'), by means of a 'host'. These standards are colloquially referred to as 'SECS/GEM'.

How we work with SECS/GEM

As a provider of semiconductor manufacturing equipment, we offer a SECS/GEM-compliant interface for our system control software (PTIQ, PCx) with documentation to support your integration efforts.

Oxford Instruments Plasma Technology systems are controlled from a PC running either:

  • PTIQ – our latest, modern software platform
  • A member of our older PCx family of software

Whether the system is run by PTIQ or PCx, we can configure the software to provide a SECS/GEM interface.

Documentation

We provide technical documentation of the interface, which is needed by your SECS/GEM integrator. It complements, and requires, knowledge of how to operate the Oxford Instruments Plasma Technology system.

Integration support

We can provide fixed-duration support for your integration development efforts. On-site and remote-only options are available.

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secsgemsoftwarestructure

Capabilities of SECS/GEM

  • Data collection. Enable the host to monitor equipment activity:
  • Event reporting. Inform the host when significant ‘collection’ events occur on the equipment, such as completion of wafer transfer
  • Trace data reporting. Send data samples periodically from equipment to host
  • Limit monitoring. Inform the host when a data variable on the equipment exceeds defined limits
  • Reports. Define what data to include in event reporting
  • Establish communications. Establish equipment-host communications following system initialization or loss of communications
  • Spooling. Buffer (on the equipment) messages intended for the host during communication failure and deliver when communication is restored
  • Remote control. Provide the host with limited control over equipment operations such as START, and ABORT
  • Alarm management. Notify the host and manage alarm conditions on the equipment
  • Equipment constants. Enable the host to define operational settings on the equipment
  • Process recipe management. Enable the host to manage process recipes on the equipment
  • Equipment terminal services. Enable the host to display text messages on the equipment UI and vice-versa
  • Error messages. Provide this host with descriptions of equipment errors
  • Clock. Enable the host to read and update the system clock of the equipment
  • Control. Enable the host (or user) to configure the equipment's control-related behavior

Architecture of SECS/GEM

The standards are defined by the Semiconductor Equipment and Materials International (SEMI) industry association.

Model layer

Message layer

Protocol layer

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Introducing... PTIQ Software

PTIQ is the latest intelligent software solution for PlasmaPro and Atomfab processing equipment.

  • Exceptional level of responsive system control
  • Optimise system and process performance
  • Different levels of software to suit your requirements
  • Brand new intuitive layout and design
EXPLORE PTIQ
PTIQ

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