Part of the Oxford Instruments Group
PTIQ Software

Intelligent Software. Powerful Solutions.

PTIQ is the latest intelligent software solution for PlasmaPro and Ionfab processing equipment. It provides an exceptional level of system control as standard, as well as the option for extra performance with PTIQ Pro.


Key Features

  • Standard and comprehensive level of software control
  • Market-leading touch-screen compatible GUI makes understanding and controlling systems easy and intuitive
  • Designed from the ground-up to deliver reliable, repeatable and responsive equipment control
  • Includes our AnalytIQs viewers to visualise processing history



The Pro version includes everything the standard version offers plus:

  • Support for advanced metrology and hardware options
  • Optimised tools to help you get the most of your equipment:
    • Comparing data from multiple runs
    • Enhanced wafer scheduling
    • Agile & flexible recipes
    • Plasma strike assist

AnalytIQs Pro

Our AnalytIQs Pro features allow deeper understanding and interpretation of logged processes through the statistical analysis of data.

Extend the PTIQ LogViewer for precise tracking and analysis of all system parameters

  • Measure, analyse and report on the data captured whilst processing
  • Maximise the uptime of the system with a range of predictive tools

DiagnostIQs Pro*

An advanced set of tools which add on-system predictive maintenance features that analyse equipment and subsystem performance.

  • Self-testing capability
  • Equipment performance monitors
  • Advanced diagnostics, using stream analytics of equipment data
  • Preventative maintenance warning features

SECS/GEM Factory Host Connection

A software module that will connect your Oxford equipment over SECS/GEM link to a factory host controller for use in an automated semiconductor fab.

A quotation can be configured as either:

  • First-of-a-kind-in-fab
  • Repeat order as a duplicate of an existing system at that facility

PTIQ Backup

The premium module is responsible for periodic backup of recipes, configuration and process run data to a remote computer. This can be for archival purposes or to transpose the data ready for external processing as required, 

Worldwide Support

We are committed to supporting our customers' success. We recognise that this requires world-class products complemented by world-class support. Our global service force is backed by regional offices, offering rapid support wherever you are in the world. Find out more about our Support Contracts.

Compatible Systems

PlasmaPro 80 PlasmaPro 100 PlasmaPro 800
PlasmaPro 1000 Atomfab ALD FlexAL
Ionfab Nanofab Polaris

Note: systems require X20 Control System.


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