Part of the Oxford Instruments Group

Upgrade to PTIQ

PTIQ is the latest intelligent software solution for PlasmaPro, Plasmalab and Atomfab processing equipment.

  • Exceptional level of responsive system control
  • Optimise system and process performance
  • User-friendly design

Intelligent Software. Powerful Solutions.

Upgrade for Maximum Performance

PTIQ is the latest software innovation for utilising Plasma Technology systems. Introduced to replace the PCx series of software applications, its modern design and powerful feature-set greatly improves the user/ownership experience, and the all-new architecture provides a solid foundation for all future development. As support (coverage) for systems/hardware is increased, and new functionality is added, PTIQ will increasingly represent a core value proposition of Plasma Technology products.

NOTE: We are experiencing a bug issue with the PTIQ software. This issue is limited to a very specific type of recipe editing, so most customers will not encounter the issue. Please click here to help you debug the issue.

Benefits of PTIQ over PCx

User-friendly Design

  • Modern user interface design for greater productivity.
  • New architecture, rebuilt from the ground up, makes possible a wealth of future innovations, such as advanced analytics and system diagnostics that will provide more insight into your system’s performance than ever before

Improved Operation & Personalization

  • Improved error reporting, including active device interlocks and troubleshooting guide
  • Calibration of device read-backs, such as pressure readings, for greater accuracy in process repeatability
  • Replaced Service Mode with more powerful device control (including 'hold' and 'force') for increased flexibility
  • Single integrated application that allows hyperlinking between pages
  • Service Mode replacement allows manual control with interlocks live
  • Personalisation feature enabled improved customisation and efficiency
PTIQ screen layout

PTIQ Screen Layout

Enhanced Accuracy

  • Internals run on accurate 10ms synchronised clock for jitter-free control, metronomic output and oscilloscope-like measurements
  • Routine maintenance procedures can be recorded and run in the improved recipe structure


Recipe Features

  • Tolerance values can now be defined per-step, enabling more refined control over your process
  • Edit multiple recipes simultaneously
  • Cut, Copy and Paste whole recipes or parts of recipes
  • Whole recipe viewable on one page
  • Ability to alter chamber options during recipe (wafer lift, table lift, ESC, etc.)

Additional Features

  • Powerful and flexible scheduling for improved processing efficiency with route-based logic and improved logic for multiple chamber visits, return to load-station, inter-wafer and wafer-alignment operations
  • Complex wafer routes can be created graphically, multiple chamber visits, returns to load stations and inter wafer operations
  • Guaranteed 100 Hz sampling frequency, significantly improved over 4 Hz variable frequency of PCx, provides insight into high-frequency processes and instabilities (e.g., DC bias switching) and parameter transitions in ALD/ALE that were not previously observable

Upgrading to PTIQ

If you currently run a system with PC2000 or PC4500, and want to upgrade to PTIQ, we have several upgrade paths available.

We also have site-wide PTIQ Upgrade plans; you can upgrade your whole site for a discounted rate to ensure continuity of software support going forward.

*PTIQ upgrade is not currently available on FlexAL or Ionfab platforms.

**System upgrade eligibility will be assessed on a case by case basis, however you can use the eligibility checker here to make a start.


Debugging in PTIQ

We are experiencing a bug issue that has been identified with the PTIQ control software. The issue affects all versions of PTIQ up to and including 2021.13.02. This issue is limited to a very specific type of recipe editing (using sub-steps within a recipe step) so most customers will not encounter the issue. Please click here to help you debug the issue.


What are the hardware upgrades that we need to have to be able to upgrade to PTIQ?

This will be evaluated by case-by-case basis. Certain system types, particularly more recent ones, are more likely to be supported without additional development. Older system types may lack support for specific components, while other may not be supported entirely (thus replacement is worth consideration).

In addition to component level support, X20 PLCs (1584 or later) are also required, as is 8GB of PC memory and a 1080p display.

With existing PC4500 software, LogViewer log files can be viewed on another PC if manually transferred to another PC. It would useful if remote users could more easily access data files and analyse it. What will the new software offer?

We will soon be packaging the Datalog viewer as a standalone product so that it may be installed on a separate PC. We are looking to make the process of transferring files much easier.

Demo for Plasma Systems

We are so confident in our new software, we want you to see it in action! Watch our latest software demonstration.

You'll find out about the benefits of upgrading to PTIQ and what it can do for you. 

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