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Service & Support

Support Packages

Services

Oxford Instruments provides services from R&D start-up to fab expansion, from pilot lines to mass production. Whatever your needs we have a service package to ensure your system and lab or fab are operating at peak performance.

Remote Support

To ensure continued optimal performance of your tool, this support package has been designed specifically for customers using their own on-site technical team to maintain their equipment and includes invaluable support provided remotely by Oxford Instruments Plasma Technology’s highly-skilled experts.

We provide support through innovative platforms to resolve smoothly the technical issues, using Oxford Instruments Live Assist and TeamViewer. The remote support is available during normal business hours 08:00 - 17:00 from Monday to Friday.

FIND OUT MORE ABOUT REMOTE SUPPORT

The Remote Support Package includes:

  • Response time within 48 hours during Oxford Instruments business days (national holidays are excluded)
  • Remote support toolkit, including RealWear smart glasses, common service toolkit, iPad, Wi-Fi adaptor, fault finding aids (full toolkit list available on request)
  • 1 preventative maintenance (PM) kit, with an engineer providing remote support to complete the PM
  • Repair parts identified while troubleshooting remotely
  • 10% discount for future services including spares, consumables, and upgrades

Self Sufficiency

Our Self Sufficiency packages give you the freedom to manage and maintain your system using your own engineers – with a little help from us when you need it.

Self Sufficiency Package

If you want to take care of your equipment inhouse, our self-sufficiency package gives you the in-depth training required to maintain uptime with access to help desk support, discounted spares and engineering time.

This package is suitable for Universities, Institutions and pilot R&D production who have engineering support on-site but require maintenance training for Engineering teams.

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Self Sufficiency Plus Package

The Plus package has all the features of Self Sufficiency enhanced with additional training services, fast help desk access and a number of guaranteed onsite visits from our highly experienced field service engineers.

 

Service Agreements

Our Service Support Agreements provide access to our expert help desks, field service engineers and spare parts to ensure that uptime, cost of ownership and productivity stay at an optimal level if you don't have in-house engineering support.

Priority Support Package

The Priority Support package gives peace of mind at minimal investment knowing that access to the help desk and a number of engineer visits within 5 days can be accessed.

This package is suitable for customers who require access to our helpdesk and limited on-site support with the option of including spare parts. Customers with single chamber products such as Ion Beam, PlasmaPro 100 etch and deposition tools typically purchase this agreement.

This service agreement will follow on from your warranty period and will ensure continued optimal performance of your tool. Investing in this package provides peace of mind that access to Oxford Instruments is readily on hand.

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Production Critical Package

Offering unlimited access to our helpdesk and field service engineers, the Production Critical package is for those who require a higher level of guaranteed support for a greater level of uptime with the option of including spare parts.

Working on system in cleanroom

Customers with PlasmaPro single chamber and multi-chamber clusters typically purchase this agreement. This service agreement automatically enhances the warranty period to the same production critical response times.

Feature Comparison

Warranty Agreements

Service Agreements

REMOTE SUPPORT

SELF SUFFICIENCY

SELF SUFFICIENCY PLUS

PRIORITY SUPPORT

PRODUCTION CRITICAL

Duration

12-36 months

Training

1 credit

2 credits

2 credits

Technical Help Desk

Normal office hours 08:00-17:00 Monday-Friday

Technical Help Desk min. response time

Within 48 hours

Within 24 hours

Within 4 hours

Within 24 hours

Within 4 hours

Engineer site visits

Remote support Toolkit sent in advanced of PM 

10% discount

Maximum 2 visits with engineer on-site within 2 working days

Maximum 2 visits with engineer on-site within 5 working days and 10% discount for further visits

Unlimited visits with engineer on-site within 2 working days

Preventative maintenance

1 PM Kit / module with dedicated engineer connected remotely included

Parts (not including consumables)

Optional extra

Optional extra

Discount on all spares

10% discount

10% discount

15% discount

10% discount

15% discount

Software Help Desk

10% discount

10% discount

Normal office hours 08:00-17:00 Monday-Friday and response within 4 hours

Normal office hours 08:00-17:00 Monday-Friday and response within 24 hours

Normal office hours 08:00-17:00 Monday-Friday and response within 4 hours

Need more information or further details?

REQUEST A CALLBACK

Global Customer Support

Oxford Instruments is committed to providing comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of the tool.

  • Remote diagnostics software provides quick & easy fault diagnosis & resolution
  • Support agreements are available to suit the budget and situation
  • Global spares in strategic locations for quick response
  • Global service engineers provide preventative maintenance service & support
  • A wide range of upgrades, for process improvements, greater productivity & reduced cost of ownership of your tool are available

Request a Callback

Prefer to speak to a member of our Customer Support team to discuss your requirements?
Request a callback by completing the form below and we'll phone you as soon as possible.

 

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