Part of the Oxford Instruments Group
Service & Support

Service Support Options

Software Assurance

The Software Assurance Agreement covers the system control software and in addition to giving access to the software help desk beyond warranty, provides peace of mind knowing you have access to all the latest software releases with improved features and functionalities managed via Oxford Instruments’ software release program.

Service Credits

Service Credits can be purchased at any time offering the security of knowing that they can be used a number of ways to maintain your system. Service Credits can be exchanged for engineer visits, training, PMs, spares parts, upgrades and software assurance agreements. Bonus credits are available based on minimum order value.

Preventative Maintenance Service

Your Oxford Instruments Plasma Technology system is a significant investment. We strongly recommend that at least one annual Preventative Maintenance (PM) routine is undertaken to retain your system’s high standard of performance. Purchasing our PM Service is a convenient and reliable way to address your requirements. Please contact your local service sales team for a free consultation. We can design a bespoke PM service to suit your system/s and usage profile/s.

Features of Preventative Maintenance

  • One customised PM routine per year based on tool type and usage
  • Travel and living expenses
  • One PM kit
  • System test and post-PM validation
  • One-year minimum contract with discounts available for multi-year contracts
Cleanroom technicians in fab

Benefits of Preventative Maintenance

  • Maximise Productivity. Maintenance is unavoidable. Planning ahead for scheduled maintenance can reduce or avoid sudden and unforeseen downtime, allowing you to maximise uptime and maintain production.
  • Take Control. Planning ahead for scheduled maintenance allows control over downtime and reduces uncertainty.
  • Safety. PM can help avoid injury to workers and damage to property by ensuring your system remains safe.
  • Extend system lifespan. System lifespan can be extended with effective PM.
  • Lower financial costs. The cost of preventative maintenance is usually much lower than the cost of reactive maintenance and unplanned downtime is almost always more costly than scheduled downtime.

Our PM service is available as a standalone contract or as part of our Service Support Agreement contracts.


Global Customer Support

Oxford Instruments is committed to providing comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of the tool.

  • Remote diagnostics software provides quick & easy fault diagnosis & resolution
  • Support contracts are available to suit the budget and situation
  • Global spares in strategic locations for quick response
  • Global service engineers provide preventative maintenance service & support
  • A wide range of upgrades, for process improvements, greater productivity & reduced cost of ownership of your tool are available

More from Service & Support

Find Support Near You