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Service & Support
Service Support Options

Software Assurance

The Software Assurance Agreement covers the system control software and in addition to giving access to the software help desk beyond warranty, provides peace of mind knowing you have access to all the latest software releases with improved features and functionalities managed via Oxford Instruments’ software release program.

Service Credits

Service Credits can be purchased at any time offering the security of knowing that they can be used a number of ways to maintain your system. Service Credits can be exchanged for engineer visits, training, PMs, spares parts, upgrades and software assurance agreements. Bonus credits are available based on minimum order value.

Preventative Maintenance

Preventative maintenance (PM) is recommended to be performed annually to retain the high standard of performance from your Oxford Instruments system. If you want a PM plan only, take advantage of having a bespoke plan designed for your system and your usage.

Regularly scheduled maintenance can identify potential problems before they occur. Managed maintenance also enables cost management and will help you avoid the risk and expense associated with unplanned downtime.

Cleanroom technicians in fab


Global Customer Support

Oxford Instruments is committed to providing comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of the tool.

  • Remote diagnostics software provides quick & easy fault diagnosis & resolution
  • Support contracts are available to suit the budget and situation
  • Global spares in strategic locations for quick response
  • Global service engineers provide preventative maintenance service &
  • A wide range of upgrades, for process improvements, greater productivity & reduced cost of ownership of your tool are available

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