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Part of the Oxford Instruments Group
As Vertical Cavity Surface Emitting Lasers (VCSEL) shipment volume increases, Oxford Instruments Plasma Technology enables its customer to improve yield and drive manufacturing cost down.
Our systems are well proven, with over 90% uptime and processes that are guaranteed to ensure rapid startup during installation.
Vertical Cavity Surface Emitting Lasers (VCSEL) is a technology of choice for applications where compact size, high beam stability and low power consumption matters.
We applied our processing knowledge to enable device cost and performance and maximize production of good die per day.
VCSELs are used in Light Detection And Ranging (LiDAR), enabling autonomous vehicles to detect distances and movement. Other applications of VCSEL is in 3D sensing for facial, object and gesture recognition, and biometric payments.
VCSEL mesa Top view
VCSEL mesa Top view
VCSEL mesa vertical cross section
High surface quality
Simplified process flow. Orange processes show solutions covered by Oxford Instruments' technology. ICP Etching is covered by Plasmafab Cobra GaAs VCSEL.
Endpoint techniques enable a tighter distribution of etching depth to a target layer by allowing for run-run etch variations as well as variations in the incoming material target thicknesses.
Our PTIQ system software has been designed to deliver an exceptional level of responsive system control, reliability and repeatability for Oxford Instruments customers. It will optimise system and process performance in the Lab or Fab, with different levels of software available to suit facility requirements.
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Platforms may be clustered to combine technologies and processes with either cassette or single wafer loading options. hexagonal or square transfer chamber configurations are available.
Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.
Speak to our experts or request pricing information today.
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