Part of the Oxford Instruments Group

Optimised GaAs VCSEL Process

ICP Etch Solutions for VCSEL Applications

PlasmaPro 100 Cobra is our leading ICP etching system and solution for reliable volume VCSEL production.

  • Specially designed for VCSEL production manufacturing
  • Superior process uniformity
  • Cost-effective solution with photo resist and hard mask
  • Precise control of profile angle for excellent CD control
  • Extremely-low footing for enhanced etching depth control
  • Powered by our proprietary PTIQ software

Designed for high volume manufacturing

As Vertical Cavity Surface Emitting Lasers (VCSEL) shipment volume increases, Oxford Instruments Plasma Technology enables its customer to improve yield and drive manufacturing cost down.

Our systems are well proven, with over 90% uptime and processes that are guaranteed to ensure rapid startup during installation.

Key Benefits

  • Market-leading surface finish on mesa sidewall with no residue and no roughness
  • Precise control of profile angle to enable excellent CD control and support control over aperture dimensions
  • Extremely-low footing to deliver enhanced control over etching depth and more precise definition of end layer
  • Cost-effective solution with high process quality delivered using photo resist and hard mask
VCSEL mesa Top view

Cobra GaAs VCSEL System

Cobra GaAs VCSEL System

Related Webinar

Etch and Deposition for the High Volume Production of Reliable VCSEL Devices

Related White Papers

Advanced Endpoint Control Techniques for VCSEL Mesa Manufacture
High yield manufacturing of mesas in GaAs based VCSELs

VCSEL Manufacturing

Vertical Cavity Surface Emitting Lasers (VCSEL) is a technology of choice for applications where compact size, high beam stability and low power consumption matters.

We applied our processing knowledge to enable device cost and performance and maximize production of good die per day.

VCSELs are used in Light Detection And Ranging (LiDAR), enabling autonomous vehicles to detect distances and movement. Other applications of VCSEL is in 3D sensing for facial, object and gesture recognition, and biometric payments.

Biometric Payment
Face ID
Gesture Recognition

Image of VCSEL mesa Top view

VCSEL mesa Top view

Image of VCSEL mesa Top view

VCSEL mesa Top view

Image of VCSEL mesa Cross section - vertical

VCSEL mesa vertical cross section

Image of VCSEL mesa Cross section – surface quality close up

High surface quality

GaAs VCSEL Manufacturing Process

GaAs VCSEL Manufacturing Process stage 1
GaAs VCSEL Manufacturing Process stage 2
GaAs VCSEL Manufacturing Process stage 3

Simplified process flow. Orange processes show solutions covered by Oxford Instruments' technology. ICP Etching is covered by Plasmafab Cobra GaAs VCSEL.


Endpoint techniques enable a tighter distribution of etching depth to a target layer by allowing for run-run etch variations as well as variations in the incoming material target thicknesses.

Maintenance & Serviceability

Pre-emptive maintenance

  • Pre-emptive maintenance reminder based on hardware component usage data, e.g valve action. Prevent excessive downtime
  • Automated daily, weekly and monthly tasks

Ease of maintenance

  • Automated maintenance activity through recipes
  • Chamber Cleaning Guards (protects the tools from particles when a physical clean occurs)
  • 90-degree lid opening (enables a significant improvement of access for maintenance of the tools)

Service repairs

  • PTIQ SEMI E95 compliant software providing remote diagnostic enabling quick and easy fault diagnosis and resolution
  • Service engineer mode for rapid fault tracking, allowing for comprehensive and clear I/O view


  • One of the first to market with uniform process for 150 mm wafers
  • Endpointing contributes to increased yield.

PTIQ Software

Our PTIQ system software has been designed to deliver an exceptional level of responsive system control, reliability and repeatability for Oxford Instruments customers. It will optimise system and process performance in the Lab or Fab, with different levels of software available to suit facility requirements.

  • SEMI E95 compliant to facilitate rapid, error-free process setup
  • Automated daily, weekly, and monthly checks to optimise uptime
PTIQ software screenshot FIND OUT MORE >

Highly-configurable, flexible systems

Cluster Options

Platforms may be clustered to combine technologies and processes with either cassette or single wafer loading options. hexagonal or square transfer chamber configurations are available.

Cobra HV4 Cluster
Cobra HV4 Cluster
Cobra HV4 Cluster
Cobra HV6 Cluster

Global Customer Support

Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.

  • Remote diagnostics software provides quick and easy fault diagnosis and resolution
  • Support contracts are available to suit the budget and situation
  • Global spares in strategic locations for quick response

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