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Etch and Deposition for the High Volume Production of Reliable VCSEL Devices

21st July 2022 at 3 PM (BST)

About the Webinar

The applications and market share of Vertical Cavity Surface Emitting Lasers (VCSELs) are growing, with increasing demand for ‘high tech’ applications such as facial recognition in smartphones, LiDAR (Light Detection and Ranging), and data transfer. Precise control of manufacturing, from the epitaxy to designing contacts, is essential to achieve the targeted electrical and optical characteristics of a VCSEL.

In this webinar, based on our experience in nanofabrication and plasma processing solutions, we discuss key etching and deposition steps in the manufacture of reliable VCSEL devices including the production of an effective hard mask and accurate and repeatable mesa etching.


Meet the Presenter

Dr Katie Hore

Dr Katie Hore

The Commercial Solutions Team Leader for Optoelectronics, and Power and RF at Oxford Instruments Plasma Technology. As an Applications Engineer, she specialises in etching indium phosphide, gallium arsenide, and other III-V related materials. She received her DPhil in Inorganic Chemistry from the University of Oxford where she studied solid-state hydrogen storage materials.

Katie also has an MRes in materials and nanotechnology from the University of Birmingham and an undergraduate chemistry degree from the University of Bristol. As well as managing the Optoelectronics, and Power and RF Applications Teams in the Applications Solutions Group, she works on developing and supporting etching processes for customer requirements and on new product introductions.


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