Part of the Oxford Instruments Group
Training Courses

Specialist Training Modules

Process & Handler Training (All Levels)

We offer two individual trainings modules for Process and Handler. The Process training course is suitable for applications engineers seeking to develop the essential skills required to improve their understanding of the various chemistries, including optimisation and analysis. The Handler training course is suitable for equipment engineers seeking to develop the essential skills required to re‑teach the robot, configure tool handling, and complete a wafer size change.

Handler training course at Oxford Instruments

Process Training Module

Process engineers looking to develop the essential skills required to better understand the various processes including process optimisation and analysis.

You'll learn how to:

  • Introduction to Process (general or specific to requirements)
  • Process setup and Optimisation (including process trends)
  • Process measurements and analysis techniques
  • Endpoint training (optional)
  • Chamber cleaning (Plasma and mechanical cleaning)
  • Use Log Viewer/Activity Explorer for identifying system health trends
  • Process troubleshooting

Handler Training Module

Held at our UK headquarters, you'll learn about the Brooks MMX, Hine or EMS platforms. We have designed this course for maintenance and equipment engineers requiring specialist handler training.

You'll learn how to:

  • How to rectify wafer placement errors and reset the handling using the hand pendant
  • Undertake basic setup routines
  • Change wafer sizes
  • Elevator configuration and set up

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