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Technical Training Courses

Specialist Technical Training Modules

Process and Handler Technical Training (All Levels)

We offer two individual technical training modules for Process and Handler. The Process course is suitable for applications engineers seeking to develop the essential skills required to improve their understanding of the various chemistries, including optimisation and analysis. The Handler course is suitable for equipment engineers seeking to develop the essential skills required to re‑teach the robot, configure tool handling, and complete a wafer size change.

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Handler training course at Oxford Instruments

Process Technical Training Module

Suitable for Process engineers looking to develop the essential skills required to better understand the various processes including process optimisation and analysis.

You'll learn how to:

  • Introduction to Process (general or specific to requirements)
  • Process setup and Optimisation (including process trends)
  • Process measurements and analysis techniques
  • Endpoint training (optional)
  • Chamber cleaning (Plasma and mechanical cleaning)
  • Use Log Viewer/Activity Explorer for identifying system health trends
  • Process troubleshooting
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Handler Technical Training Module

Held at our UK headquarters, you'll learn about the Brooks MMX, Hine or EMS platforms. We have designed this course for maintenance and equipment engineers requiring specialist handler training.

You'll learn how to:

  • How to rectify wafer placement errors and reset the handling using the hand pendant
  • Undertake basic setup routines
  • Change wafer sizes
  • Elevator configuration and set up
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