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Training Courses
Intermediate Level Courses

Equipment & Maintenance Training

We provide intermediate level courses suitable for maintenance or equipment engineers who are looking to expand their knowledge in the components and software of Plasma and Ion Beam Platforms. Intermediate Level Courses are addressed to people who are already familiar with the basics of hardware and software of our Systems.   

If you need a more basic training for our systems, please visit the Basic Training Courses. For customer who would like a comprehensive training in order to become self-sufficient in both maintenance and the diagnosis of system hardware issues, please visit the Advanced Level Courses. Additionally, we offer Standalone Training Modules for Process and Handler.

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Ionfab, the Ion Beam Etching & Deposition system

Plasma Equipment Training

Examine and explore, in detail, the various hardware blocks, software diagnostic options and electrical schematics of your system. 

You'll learn:

  • Benchmark tool performance prior to maintenance
  • How to carry out essential skills, such as returning of the AMU
  • How to recognise and isolate hardware issues using service mode
  • Appreciate the interlock scheme and interpreting alarm signals appropriately
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Ion Equipment Training

You will learn:

  • Basic system health checks and benchmarking
    tool performance
  • The software's source controller, states and error codes
  • About the ion source and neutraliser
  • Fault diagnosis example scenarios and interpreting alarm signals appropriately
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Plasma Maintenance Training

You will learn:

  • How to benchmark tool performance and make health checks to the Plasma  systems
  • Disassembly and rebuild of electrode and source for Plasma Platforms.
  • Main hardware blocks and internal electrical structure
  • Theoretical units on the interlock scheme, PLC and RF
  • How to utilise Logviewer and diagnostic viewer to identify faulty hardware
  • Full review of sample holder
  • Practice diagnostic skills with a range of pre-set fault scenarios

The course can be adapted to suit the background, experience and needs of those attending.

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Ion Beam Maintenance Training

You'll learn:

  • How to benchmark tool performance and make health checks to the Ion Beam system
  • Disassembly and rebuild of ion source, neutraliser and grids for Ion Beam Platforms.
  • The machinery standard safety circuit for Ion Beam
  • How to utilise Logviewer and diagnostic viewer to identify faulty hardware
  • How to practice diagnostic skills with a range of pre-set fault scenario

Additional units of training can be added depending on the needs and experience of those attending. 

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