Part of the Oxford Instruments Group

Upgrade to PTIQ

PTIQ is the latest intelligent software solution for PlasmaPro and Plasmalab and processing equipment.

  • Exceptional level of responsive system control
  • Optimise system and process performance
  • Different levels of software to suit your requirements
  • Brand new intuitive layout and design

Intelligent Software. Powerful Solutions.

Upgrade for Maximum Performance

PTIQ is the latest intelligent software solution for PlasmaPro, Plasmalab and Ionfab processing equipment. PTIQ provides an exceptional level of system control as standard, as well as the option for extra performance with PTIQ Pro.

Responsive. Reliable. Repeatable

Offering an exceptional level of reliability and repeatability, PTIQ will optimise system and process performance in the Lab or Fab, with different levels of software available to suit facility requirements.

Features & Benefits

What are the benefits compared to PC2000 and PC4500?

Increased intelligence

  • New intuitive layout providing an enhanced level of information
  • Intelligent Assist features
    • Process Readiness Advisories that alerts users to "Known Good Practices"
    • Enables complete flexibility with User Requests


More productive

  • Relevant information where you need it
  • User interface designed to reduce mouse clicks


Enhanced accuracy

  • Internals run on accurate 10ms synchronised clock for jitter-free control, metronomic output and oscilloscope-like measurements


Time saving

  • Routine maintenance procedures can be recorded and run in the improved Recipe structure
  • Automate dialy, weekly and monthly tasks
PTIQ screen layout

PTIQ Screen Layout


  • Personalisation feature enabled improved customisation and efficiency
  • Multi-language support


Service & user benefits

  • Single integrated application that allows hyperlinking between pages
  • Always-on diagnostics
  • Self-testing
  • Live reporting, per device, of adctive interlocks
  • Electronic zeroing of devices
  • Per device alarm status
    • Troubleshooting guide
  • Service Mode replacement allows manual control with interlocks live
  • "Hold" and "Force" of devices
  • Custom overlays

A recipe editor that matches our process datasheets.

Recipe Features

  • Routine maintenance procedures can berecorded and run in the improved Recipe structure
  • Cut, Copy and Paste whole recipes or parts of recipes
  • Tolerances set in process recipes
  • Edit multiple recipes simultaneously
  • Whole recipe viewable on one page
  • Ability to alter chamber options during recipe (wafer lift, table lift, ESC, etc.)

Additional Features

  • A flexible batch scheduler that will adapt tochanging chamber status and re-route to other available chambers
  • Complex wafer routes can be created graphically, multiple chamber visits, returns to load stations and inter wafer operations
  • Multiple parallel processing of wafers
  • Throughput optimisation by having wafers ready outside of waiting chambers

Upgrading to PTIQ

If you currently run a system with PC2000 or PC4500, and want to upgrade to PTIQ, we have several upgrade paths available.

We also have site-wide PTIQ Upgrade plans; you can upgrade your whole site for a discounted rate to ensure continuity of software support going forward.



When is this available?

PTIQ is available now.

Since February 2020, systems have been quoted, are being built, and leaving the factory with PTIQ. At present, around 75% of our product line is utilising PTIQ, meaning PlasmaPro 100, 80, and 800 are currently set up for the new software. Our new ATOMFAB system also includes PTIQ.

Before the end of the year, it will be made available on our Ionfab, Estrelas and Polaris systems.

What are the hardware upgrades that we need to have to be able to upgrade to PTIQ?

This will be evaluated case-by-case, but there are some minimum specifications we need for PTIQ to work on an existing set of hardware:

  • 1080p widescreen monitor
  • Relatively new PLC (internal compute module inside the process chamber: an X20 variety and specifically a 1584 module that has the larger memory. This is typical of most systems installed within the last 2 years).
  • Some minor ancillary modules (e.g. Profibus module)
  • At least 8GB of computer memory

If I have an etch system and a deposition system, will it be the same software and work the same way?

Yes. This was an important goal for the new software to give a consistent look and feel and to find the common actions needed to operate all our systems.

There will be a few notable differences, but they relate to the specific technologies involved. This means that, whether the modules exist on the same cluster configuration or are side by side as two separate single module tools, the software will be the exact same.

Does this work with cluster systems?

We support our three families of products with PTIQ: open-load, single module and out cluster systems. All three types of system have the same look and feel and operate in a similar manner.

Is PTIQ touch screen compatible?

We have designed the software with the view that it will be controlled via a touchscreen, ensuring that with a 24” touchscreen that the active areas will be at least 1cm square. Although the SEMI E95 standard is no longer active, it does still serve a purpose in helping to make a touchscreen operator interface for Semiconductor Capital Equipment.

Is PTIQ multi-monitor compatible?

This is on our short-term roadmap. We built the software from the ground up with dual monitor support from the beginning, but this is not yet available to be activated in the software as this feature needs a little more work before it is complete.

With existing PC4500 software, LogViewer log files can be viewed on another PC if manually transferred to another PC. It would useful if remote users could more easily access data files and analyse it. What will the new software offer?

We will soon be packaging the Datalog viewer as a standalone product so that it may be installed on a separate PC. We are looking to make the process of transferring files much easier.

Can a parameter (e.g. RF) be graded from start and end value through a loop?

This feature is in the process of being developed as we seak to support the more advanced deep silicon etch processes. Our implementation will be available for all process modules when it is released, not only the Estrelas tool.

Do you have a simulator of this software that we can install in our personal computer for testing or training?

We have a simulator/emulator that can be used for this purpose. For example, it does a very good job of emulating the hardware including some simple algorithms to emulate the physics involved in pressure control.

Upgrade Demonstration for Your Plasma-based System

We are so confident in our new software, we want you to see it in action! Register now for one of our upcoming live software demos!

You'll find out about the benefits of PTIQ, what it can do for you, and have the opportunity to ask our experts anything you want to know.

Choose a time to suit you.

Wednesday 19th August
8:30AM BST


Wednesday 19th August


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