Part of the Oxford Instruments Group
Expand
Oxford Instruments
Applications
Products
News
Events
Contact
InvestorsCareersNewsEventsContacteCommerce
Investors Careers
About Us
Our FacilityNewsEventsSolutions for ProductionSolutions for Research
Introducing Atomfab
Markets
2D materialsBiomedical DevicesFailure Analysis
HBLEDsInfrared sensorsLasersVCSELs
MEMS & SensorsPower DevicesQuantum Information ProcessingRF Devices
Introducing Atomfab
Technologies
Plasma EtchingReactive Ion EtchingRIE-PEICP Etching
Ion Beam
IBDIBE
Plasma deposition
PECVDICPCVDCVD
Atomic scale
Atomic Layer DepositionAtomic Layer EtchingAtomic Scale Processing
Introducing Atomfab
Materials
1D materials2D materialsAl2O3AlGaN-GaNAlNa-SiCrCo
DiamondDLCGaSbGaAs/AlGaAsGaNGaPHfNHfO2
InP/InGaAs/InAlAsInSbNbNNiPMMAPtSiSiC
SiGeSiNxSiO2Ta2O5TiO2VOxZnOMore materials...
Products
ICPPlasmaPro 80 ICPPlasmaPro 100 CobraPlasmaPro 100 PolarisRIEPlasmaPro 80 RIEPlasmaPro 100 RIEPlasmaPro 800 RIE
Deep Si Etch
PlasmaPro 100 Estrelas
PECVDPlasmaPro 80 PECVDPlasmaPro 100 PECVDPlasmaPro 800 PECVDPlasmaPro 1000 StratumICPCVDPlasmaPro 80 ICPCVDPlasmaPro 100 ICPCVD
ALDAtomfabFlexAL
ALE
PlasmaPro 100 ALE
Ion Beam
Ionfab 300 IBEIonfab 300 IBD
Nanoscale Growth
Nanofab
Introducing Atomfab
Library
BlogProcess NewsVideosWebinarsWhite Papers
Introducing Atomfab
Support
Service & Support
Support ContractsUpgradesSparesTrainingTeamviewerWarranty Options
Raise a Support Ticket
Contact Us
Contact Us
News
Events
Contact
eCommerce
Upgrades
Advanced Energy Paramount Generator
  1. Home
  2. Service & Support
  3. Upgrades
  4. Advanced Energy Paramount Generator

Advanced Energy Paramount Generator

We would like to notify customers that Advanced Energy, the manufacturer of our generators have announced the obsolescence of several units, and we are able to offer superior replacements.

The Advanced Energy Paramount generator is the latest build specification for Oxford Instruments high frequency (HF) RIE, ICP and Sputter processes. Offering increased reliability and greater plasma stability though the use of digital control and phase synchronization.

Obsolete unitNew option
RFG 1251Paramount 1.5KW Base Generator
RFG 3001Paramount 3KW Generator

Benefits

  • Reduces RF delivery system complexity
  • Optimises film uniformity and throughput with unprecedented power delivery accuracy
  • Enables faster, seamless process transitions
  • Reduces arc-caused contamination and damage
  • Provides advanced pulsing and pulse synchronization
Request Pricing Contact Us

Related Products

PlasmaPro 100 RIE

© Oxford Instruments 2019

Website by Miramar Communications Ltd