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Part of the Oxford Instruments Group
We would like to notify customers that Advanced Energy, the manufacturer of our generators have announced the obsolescence of several units, and we are able to offer superior replacements.
The Advanced Energy Paramount generator is the latest build specification for Oxford Instruments high frequency (HF) RIE, ICP and Sputter processes. Offering increased reliability and greater plasma stability though the use of digital control and phase synchronization.
| Obsolete unit | New option | Features |
| RFG 1251 | Paramount 1.5KW Base Generator | 13.56 MHz, <10ms Tune Time, Power Accuracy ±1 W or ±1% of set point, whichever is greater. |
| RFG 3001 | Paramount 3KW Generator | 13.56 MHz, <10ms Tune Time, ±1 W or ±1% of set point, whichever is greater. |
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