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Advanced Energy Paramount Generator

Advanced Energy Paramount Generator

We would like to notify customers that Advanced Energy, the manufacturer of our generators have announced the obsolescence of several units, and we are able to offer superior replacements.

The Advanced Energy Paramount generator is the latest build specification for Oxford Instruments high frequency (HF) RIE, ICP and Sputter processes. Offering increased reliability and greater plasma stability though the use of digital control and phase synchronization.

Obsolete unitNew optionFeatures
RFG 1251Paramount 1.5KW Base Generator13.56 MHz, <10ms Tune Time, Power Accuracy ±1 W or ±1% of set point, whichever is greater.
RFG 3001Paramount 3KW Generator13.56 MHz, <10ms Tune Time, ±1 W or ±1% of set point, whichever is greater.


  • Reduces RF delivery system complexity
  • Optimises film uniformity and throughput with unprecedented power delivery accuracy
  • Enables faster, seamless process transitions
  • Reduces arc-caused contamination and damage
  • Provides advanced pulsing and pulse synchronization
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