UPGRADES

LF Automatic Matching Unit (AMU) for Estrelas platform

Key benefits

Faster matching response (up to 0.5 seconds)
Improved plasma bias stability
Enhanced process repeatability
Air-cooled operation
Simplified maintenance
Improved positioning accuracy
Easier RF connectivity.

Designed for every stakeholder

Process engineers gain greater control and consistency. Equipment engineers benefit from simplified servicing and maintenance. Fab and operations managers can extend asset life, improve uptime, and reduce exposure to unexpected failures.

What’s included in the upgrade?

LF Automatic Matching Unit (AMU)
Electrical and mechanical integration hardware
On-site installation by an Oxford Instruments Service Engineer
Optional extra: 300W LF Generator L301

NEW: PTIQ software

PTIQ is the latest intelligent software solution for PlasmaPro and Ionfab processing equipment.

Exceptional level of responsive system control
Optimise system and process performance
Different levels of software to suit your requirements
Brand new intuitive layout and design

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Global customer support

Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.

Remote diagnostics software provides quick and easy fault diagnosis and resolution.
Support contracts are available to suit the budget and situation.
Global spares in strategic locations for quick response.

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Explore our comprehensive technical training courses

At Oxford Instruments Plasma Technology, we offer a wide range of technical training courses designed to suit all skill levels and needs.

Level 1 (Introductory): New system users for all platforms
Level 2 (Intermediate): Equipment and maintenance training for all platforms
Level 3 (Advanced): for plasma etch and deposition, ion beam and PEALD systems
Specialist technical modules: process and handler technical training for all platforms

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