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This soft pump and soft vent upgrade allows the slow pumping down of a vacuum chamber, with the aim of minimising the addition of particles on substrates that may be disturbed by rapid gas flows.
The Soft Pump and Soft Vent Upgrade is valuable for load lock and open load process chambers, because the soft pump will extend pump down time by a few minutes. Other features and benefits of the Soft Pump and Soft Vent Upgrade include:
Soft pump and soft vent upgrades are typically installed within just one day.
Soft pump and soft vent upgrades are available for all Oxford Instruments Plasma Technology platforms that include loadlock.
Please contact your local customer service sales team for more information, pricing, and a free consultation.
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