Oxford Instruments has an extensive process library, and new processes are continually being developed. We provide free on-going process support for the lifetime of any ALD tool, offering advice on developing new materials and continued access to our latest ALD process developments including new process recipes.
Can be fitted with a nitrogen purged glove box with sample entry load lock - For dry environment
Easily removable inner chamber - Reduces chamber cleaning times
Cabinet can be fitted to extraction lines and has nitrogen purge - For assured health and safety compliance
Pneumatic hoist - For safe opening of chamber
Can be fitted with extraction hood or nitrogen purged glove box - For assured health and safety compliance