CONNECT YOUR SYSTEM TO SECS GEM FACTORY AUTOMATION SOFTWARE
Enable your plasma tools to be incorporated into your SECS GEM HOST software scheme
Monitor and control the product and tool status for each tool
Allows the tool to be fully included in all your current factory automation functions such as SPC, Preventative Maintenance Scheduling, Event notification etc
SECS GEM upgrade features:
Industry Standard protocol - straightforward Integration of equipment into existing GEM-SECS HOST workflow
Reduces chance of operator errors – Automated control of equipment by factory HOST Automated real-time feedback on system status and recipe execution status from equipment to HOST
Part of the Oxford Instruments Group
