CONNECT YOUR SYSTEM TO SECS GEM FACTORY AUTOMATION SOFTWARE
- Enable your plasma tools to be incorporated into your SECS GEM HOST software scheme
- Monitor and control the product and tool status for each tool
- Allows the tool to be fully included in all your current factory automation functions such as SPC, Preventative Maintenance Scheduling, Event notification etc
SECS GEM upgrade features:
- Industry Standard protocol - straightforward Integration of equipment into existing GEM-SECS HOST workflow
- Reduces chance of operator errors – Automated control of equipment by factory HOST Automated real-time feedback on system status and recipe execution status from equipment to HOST
- Supports 200mm SEMI standards E4, E5, E30 and E37