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UPGRADES

Vacuum capacitor AMU upgrade

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  4. Vacuum Capacitor Upgrade

Faster matching. Increased reliability. Better consistency. 

Our vacuum capacitor automatic matching unit (AMU) upgrade is designed to maximise process stability and repeatability. By combining an enhanced matching algorithm with fast gas‑switching capability, it helps deliver consistent wafer-level process conditions.

Request information

Why upgrade

Higher repeatability 
Faster, more accurate matching supports stable processes and consistent results. 

Rapid matching performance 
Matching in as little as 0.5 seconds, enabling responsive operation during fast gas‑switching processes. 

Improved efficiency 
Direct‑drive technology eliminates the gearbox, for consistent positioning, repeatable matching and reduced reflected power. 

Simplified setup 
Stepper motors provide controlled, repeatable motion and easier system configuration. 

Enhanced cooling 
Air‑cooled design removes complexity while maintaining reliable performance. 

Built for control and serviceability 

Improved control
All parameters are software‑configured, with comprehensive position logging for full visibility and traceability.
No potentiometers to adjust - configuration is precise, repeatable, and tracked.

Simplified maintenance
Push‑on RF connectors enable fast, reliable connections and easier servicing.
Serviceability is improved across the system, reducing repair time and operational impact.

Fast upgrade time 

Vacuum capacitor AMU upgrades are typically completed within one day, including installation and testing — keeping disruption to a minimum.

Upgrade suitability

This upgrade is available for:

Upgrade with confidence 

Improve process stability and control with a modern AMU designed for accuracy, reliability, and long‑term performance.

Contact your local customer service sales team for pricing, eligibility confirmation, and a free consultation.

Contact us for a quotation

NEW: PTIQ software

PTIQ is the latest intelligent software solution for PlasmaPro and Ionfab processing equipment.

  • Exceptional level of responsive system control
  • Optimise system and process performance
  • Different levels of software to suit your requirements
  • Brand new intuitive layout and design
Find out more

Global customer support

Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.

  • Remote diagnostics software provides quick and easy fault diagnosis and resolution.
  • Support contracts are available to suit the budget and situation.
  • Global spares in strategic locations for quick response.
Find out more

Explore our comprehensive technical training courses

At Oxford Instruments Plasma Technology, we offer a wide range of technical training courses designed to suit all skill levels and needs.

  • Level 1 (Introductory): New system users for all platforms
  • Level 2 (Intermediate): Equipment and maintenance training for all platforms
  • Level 3 (Advanced): for plasma etch and deposition, ion beam and PEALD systems
  • Specialist technical modules: process and handler technical training for all platforms
Find out more