Part of the Oxford Instruments Group
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UPGRADES
LIGHT TOWER

LIGHT TOWER UPGRADE FOR EASY SYSTEM STATUS MONITORING

Key Features*:

  • Quick visual check of the tool status
  • Multiple states shown:
    • Process started
    • Standby
    • System ready to be vented
    • Vent finished
    • System requires customer intervention
  • The tool status without viewing the software
  • Immediately when a process is finished
  • Immediately if there is a problem

It saves you time especially if you can view without entering the cleanroom itself.

*The light tower upgrade is only available with X20 software if using a PlasmaPro 80, 800 or 100.

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