Loadlock and Handler Backing Pump

Moving engineered parts such as loadlock and handler backing pumps are subjected to intense wear and tear during system processes, meaning they will inevitably require replacement at some point in time. Loadlock and handler backing pumps are also frequently declared obsolete by manufacturers, as new design innovations, often involving greater efficiency and less energy usage, are introduced.

Where available, Oxford Instruments Plasma Technology aims to supply the latest generation of loadlock and handler backing pumps, meaning your system benefits from the most recent leading-edge design improvements.