UPGRADES

Loadlock and Handler Backing Pump

Moving engineered parts such as loadlock and handler backing pumps are subjected to intense wear and tear during system processes, meaning they will inevitably require replacement at some point in time. Loadlock and handler backing pumps are also frequently declared obsolete by manufacturers, as new design innovations, often involving greater efficiency and less energy usage, are introduced.

Where available, Oxford Instruments Plasma Technology aims to supply the latest generation of loadlock and handler backing pumps, meaning your system benefits from the most recent leading-edge design improvements.

Features and benefits

We supply a range of loadlock and handler backing pumps from leading manufacturers. The following features and benefits are shown as an example only.

Edwards nXDS15i

Edwards nXDS20i

Best solution – Ideal replacement for oil-sealed pumps
Air cooling – No installation and operational costs for water supply
Quiet operation - Better working environment
Hermetically sealed for a lubricant-free vacuum environment - Contamination free process and no oil to dispose of
Low power consumption - Low cost of ownership
Superior vapour handling - Wider range of applications
Long service intervals - Maximised up-time

Pfeiffer ACP28G

Pfeiffer ACP 15

Best solution – Ideal replacement for oil-sealed pumps
Air cooling – No installation and operational costs for water supply
Several gas port options – Purge gas, gas ballast, other specific ports according to application
Universal power supply – Wide voltage supply 50/60 Hz single-phase and three-phase
Standards – Compliance with CE standards, UL/CSA certified, SEMI S2 certified

Please contact your local customer service sales team for more information, pricing, and a free consultation.

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