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Legacy RF and LF generators can become a major source of operational risks: leading to reduced reliability, limited supportability, and declining process performance.
Our upgrade solutions provide a proven, future-ready path forward, delivered by specialist engineers with extensive system and process expertise.
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Protect uptime: reduce the risk of unplanned failures and costly downtime
Restore process stability: achieve more consistent and repeatable plasma performance.
Regain OEM-level supportability: eliminate dependence on obsolete or unsupported components
Future-proof your platform: maintain compatibility with current and emerging system technologies.
Reduce total cost of ownership: lower maintenance requirements and minimise lifecycle cost.
Our customers consistently report improved system stability, enhanced process control, and increased confidence in day-to-day operation following RF and LF generator upgrades.
Every project is delivered as a fully managed solution by experienced service engineers, covering installation, integration, commissioning, and optimisation. This ensures a seamless transition, predictable outcomes, and long-term performance improvements.
Request a system review to identify the optimum RF and LF generator upgrade path for your tool/s.
Contact us for a quotationPTIQ is the latest intelligent software solution for PlasmaPro and Ionfab processing equipment.
Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.
At Oxford Instruments Plasma Technology, we offer a wide range of technical training courses designed to suit all skill levels and needs.
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