UPGRADES

Chamber, Loadlock and Turbo Pump

Moving engineered parts such as chamber, loadlock and turbo pumps are subjected to intense wear and tear during system processes, meaning they will inevitably require replacement at some point in time. Chamber, loadlock, and turbo pumps are also frequently declared obsolete by manufacturers, as new design innovations, often involving greater efficiency and less energy usage, are introduced.

Where available, Oxford Instruments Plasma Technology aims to supply the most recent generation of pumps, meaning your system benefits from the latest leading-edge design innovations.

Features and benefits
Upgrade Information

We supply a range of chamber, loadlock, and turbo pumps from leading manufacturers. The following features and benefits are shown as an example only:

Edwards STP451C

Advanced rotor technology
Maximized process flexibility
Oil free
Low vibration
High reliability
Maintenance free
Advanced controller design
Auto tuning
Self diagnostic functions
DC motor drive
Battery-free operation
Compact design
Small footprint
Half rack controller

Pfeiffer Adixen ATH1600MT

5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 1360 l/s for N2
DN 200 CF-F flange for demanding UHV applications
Operation with Magpower external drive electronics
Installation in any orientation
Water cooled, Heated
CE marked and ROHS compliant

Pfeiffer Adixen ATH500MT

5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 550 l/s for N2
DN 160 CF-F inlet flange
Compact integrated drive electronics
Installation in any orientation
Remote, Heated
CE marked and ROHS compliant

Pfeiffer Hi Pace 80 Neo

Compact yet powerful turbopump with pumping speeds of up to 67 l/s for N2
Compact design for minimum footprint
High pumping speed and maximum compression for all gases
Integrated drive electronics
Semi S2 and UL/CSA certification
Ideal for all standard applications

Upgrade Timeline

Chamber, loadlock, and turbo pump upgrades are typically installed within just one day.

Upgrade Suitability

Chamber, loadlock, and turbo pump upgrades are available for the full range of Oxford Instruments Plasma Technology platforms.

Please contact your local customer service sales team for more information, pricing, and a free consultation.

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