INTEGRATED GAS POD UPGRADE FOR UP TO 4 ADDITIONAL LINES

Expand the capability of your tool. New processes possible by the addition of different non-toxic gases. This means that even if your external gas pod is at full capacity, you can add further gases to your tools and enable a broader range of processes or MFC flow ranges.

Features

• Up to 4 extra gas lines
• Additional to external gas pod lines
• Compact installation

Advantages

• Extra processes
• Broader MFC flow ranges
• Extra capacity