UPGRADES

Chamber Backing Pumps

Moving engineered parts such as backing pumps are subjected to intense wear and tear during system processes, meaning they will inevitably require replacement at some point in time. Backing pumps are also frequently declared obsolete by manufacturers, as new design innovations, often involving greater efficiency and less energy usage, are introduced.

Where available, Oxford Instruments Plasma Technology aims to supply the latest generation of pumps, meaning your system benefits from leading-edge design innovations.

Features and benefits
Upgrade Information

We supply a range of chamber backing pumps from leading manufacturers. The following features and benefits are shown as an example only:

Reduced cost of ownership
Low power consumption
Zero preventative maintenance
Flexible installation options
Small and light for easy installation

On-tool or remote
Consistent pumping performance globally
Pumping speed identical at 50 and 60 Hz
Reduced ambient noise
Wide range of peak speed: 100, 600, and 800 m3h-1

Upgrade Timeline

Chamber Backing Pump upgrades are typically installed within just one to two days.

Upgrade Suitability

Chamber Backing Pump upgrades are available for the full range of Oxford Instruments Plasma Technology platforms.

Please contact your local customer service sales team for more information, pricing, and a free consultation.

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