Oxford Instruments’ Gas Pods have the capability of being able to incorporate extra gas lines, allowing the user great flexibility. Additional lines may be added as User requirements change.
- Toxic and non-toxic gases may be accommodated
- Available for all Oxford Instruments’ PlasmaPro systems (Ionfab tool upgrades reviewed individually for eligibility)
- Up to 12 gas lines can be accommodated (dependant on the gas pod’s configuration)
- Installation is quick and easy
- Latest version Mass Flow Controllers (MFC) can be installed
- Greater flexibility, increasing the range of different types of processes available for each process chamber
- Industry standard MFC mounting means MFCs from different manufacturers may be installed