GAS POD UPGRADE FOR INCREASED FLEXIBILITY

Oxford Instruments’ Gas Pods have the capability of being able to incorporate extra gas lines, allowing the user great flexibility. Additional lines may be added as User requirements change.

Benefits

• Toxic and non-toxic gases may be accommodated
• Available for all Oxford Instruments’ PlasmaPro systems (Ionfab tool upgrades reviewed individually for eligibility)
• Up to 12 gas lines can be accommodated (dependant on the gas pod’s configuration)
• Installation is quick and easy
• Latest version Mass Flow Controllers (MFC) can be installed
• Greater flexibility, increasing the range of different types of processes available for each process chamber
• Industry standard MFC mounting means MFCs from different manufacturers may be installed