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UPGRADES
TEOS LIQUID LEVEL SENSING

ON-SCREEN TEOS LIQUID LEVEL MONITORING

TEOS liquid level sensing is available as an upgrade to existing TEOS liquid delivery modules currently without level sensing on the PlasmaPro 100 PECVD & Nanofab.

The level sensing is achieved using ultra sonic level sensors fitted to the TEOS canister. Three level sense positions are read by the Oxford Instruments software and a clear level indication is displayed on screen.

BENEFITS:

  • Clear advance warning of TEOS canister exchange displayed on PC2000 software.
  • The active process automatically stops should TEOS run out. Log file indicates time ran and time remaining to be processed when new canister is fitted.
  • Enables calculation of TEOS usage
  • Minimising Particle contamination on substrate caused by rapid gas flows
  • Canister valves changed from manual valves to air operated pneumatic valves for greater user robustness and more automated operation.
TEOS module Request Pricing Contact Us

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