Plasma Technology

Service Blog & FAQs

Welcome to the Oxford Instruments Plasma Technology Service blog & FAQs

We have launched the blog because we want to share with our customers important news and valuable information about the entire range of support available from our Service Operations, including system Upgrade options.

We are aiming to publish new articles monthly. Our first publication touches on the important topic of Spare Parts Management and there are several articles in the pipeline, including those on topics such as process solutions, service support contracts, and PTIQ, our flagship system software programme. We hope the blog will serve as a source of real value, a vault of information that helps you minimise your cost of ownership and optimise your system/s uptime. We will also keep you updated on the always-expanding range of professional support services and upgrade packages that we design to help our customers maximise value.

We would be delighted to hear from you and share your views regarding existing articles or suggest an important topic that you might be interested in reading. If you have something to share with us, please don't hesitate to contact us by submitting the form below.

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Service Blog

Optimal Processing with Automatic Endpoint Detectors

Automatic Endpoint Detectors use process-integrated hardware to analyse what’s happening on the wafer and/or in the system chamber to interpret critical changes that require a process to end or move to the next process step.

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Field Process Engineering

Process Engineering clearly plays a crucial role in the semiconductor industry, not least in enabling the production of progressively-smaller and increasingly-complex semiconductor devices and in improving process stability, repeatability, and yield.

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Problem-Solving Expertise

Our team is packed with knowledge and experience, prized assets for delivering effective solutions, fast. We consistently deliver on our four main tasks of implementing preventative maintenance, problem-resolution, upgrade installations, and new system commissioning.

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Training’s Transformative Potential

As anyone who works in the semiconductor industry will know, learning new skills and knowledge is a feature of the sector and its constant demands for innovation. The dynamic nature of the industry means that the skill of learning (and teaching) new skills is a fundamental requirement for success.

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Spare Parts Management

In today’s challenging supply chain environment, managing your spare parts requirements often involves extended lead times, shortages, and increased prices. These harsh global supply chain conditions mean that strategies for managing your spare parts requirements become increasingly important.

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FAQs

We maintain our system/s internally, using our own engineers, why do we need a support package?
We have a team of engineers who need to develop their knowledge of our system/s, can your support packages help?
Our business is production critical, if we experience issues with our system, then we would require urgent support. How quickly can you be on site?

FAQs | Support Agreements >

If I have an etch system and a deposition system, will it be the same software and work the same way?
Can a parameter (e.g., RF) be graded from start and end value through a loop?
Do you have a simulator of this software that we can install in our personal computer for testing or training?
Does PTIQ work with cluster systems?

FAQs | PTIQ Software >

We need some short-term process support but we don’t want a formal or annual agreement, can you help?
Do you offer support for new processes that were not part of our original Process Acceptance specification at the point of system sale?
We’re developing a new process that is likely to present challenges and take time to perfect, can you provide expert help?

FAQs | Process Solutions >

Why should we upgrade our system?
Do upgrades include a warranty?
How long will it take for my upgrade to be completed?

FAQs | Upgrades >

How secure is your log-in to our system?
How effective are TeamViewer’s remote functions?
What if we need to share files, such as data logs?

FAQs | TeamViewer >

Where are spare parts located?
Why should we buy spare parts from Oxford Instruments?
How are you managing the ongoing global supply chain problems?

FAQs | Spare Parts >

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