Part of the Oxford Instruments Group
Fabrication Processes for High Quality Quantum Devices

2 September 2021 at 4PM (BST)

About the Webinar

Quantum devices are extraordinarily sensitive to the loss of their quantum properties. Improved device fabrication processes can mitigate these losses. Working closely with the quantum community, Oxford Instruments Plasma Technology offers solutions to minimize losses arising from device processing.

In this webinar, we will review the uses of the technologies below for creating better superconducting, colour centre (diamond/SiC), and photonic quantum devices:

  • Atomic Layer Deposition (ALD) of superconducting materials for Qubits such as NbN and TiN.
  • Deep Reactive Ion Etching of Silicon (DSiE) for TSV to enable 3D integration of Quantum circuits.
  • Reactive Ion Etching (RIE) for smooth diamond thinning for NV centres.
This webinar is featured in the latest edition of Process News 2021/22.


Meet the Presenter

Dr Russ Renzas

Dr Russ Renzas

Quantum Technologies Market Manager, Oxford Instruments Plasma Technology

Russ specializes in Quantum Technology with the Plasma Technology group at Oxford Instruments. He facilitates collaborations that leverage Oxford Instruments’ process expertise to help our partners carry out world-class research.

Russ’s experience includes directing device fabrication at Rigetti Computing, a superconducting quantum computing start-up, as well as leading metrology, failure analysis, and fundamental understanding at a silver nanowire start-up. He also has experience as a deal lead for the Princeton Alumni Angels and has co-authored over 15 peer-reviewed journal articles with nearly 3000 citations. Russ has a B.S.E. in Electrical Engineering from Princeton University and earned his Ph.D. in Physical Chemistry at UC Berkeley. Russ is currently based in Reno, Nevada, where he is also Adjunct Faculty at the University of Nevada, Reno.



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