Part of the Oxford Instruments Group
Large Area Dry Etching of Slanted Gratings for Augmented Reality Applications

25 June 2020 at 3PM (BST)

About the Webinar

This webinar will give you an insight into the latest advancements at Plasma Technology on dry etching slanted features for Augmented Reality.

Waveguide combiners based on slanted gratings are a technology of choice to demonstrate high efficiency for in grating coupler. However, there are numerous challenges in their manufacturing process.

In this webinar, we discuss one of the most mature manufacturing approaches based on stamping. We'll explain how we have developed a solution for 45 degree angled features on a 200mm wafer area.

In this webinar, you will learn:

  • How to manufacture slanted grating for Augmented Reality using the Oxford Instruments IonFab® system
  • How to control critical gratings parameter to maximise yield on large wafer size
  • Best practises to demonstrate tight control of manufacturing tolerances

Special Talk by Yole Devéloppement

'Introduction to the Augmented Reality Market' by Dr Zine Bouhamri, PhD, Technology & Market Analyst, Displays at Yole Devéloppement.

Slanted grating SEM

Meet the Presenters

Dr Sebastien Pochon

Dr Sebastien Pochon
Senior Applications Engineer, Oxford Instruments

Sebastien received his PhD in Laser Physics from Southampton University, UK. He studied at Salford University, UK, where he received his MSc in Applied Optics. He also has an undergraduate degree (BSc) from Manchester Metropolitan University, UK, in Applied Physics and Material Sciences.

He joined Oxford Instruments Plasma Technology in 2006 as an Applications Engineer specialising in Ion Beam technology. Currently, Sebastien is responsible for developing cutting edge processes from metals to last facet etching to deposition of AR and HR optical coating, for both research and production customers.

Joao Ferreira

João Ferreira
Product Manager, Oxford Instruments

João joined Oxford Instruments Plasma Technology in 2009 as a Project Manager and in 2017 joined the Product Management team to manage the Ion Beam team and product strategy. He is currently a Product Manager with responsibility for several products including Ion Beam.

He graduated in Physics from Instituto Superior Tecnico, Lisbon and completed an MBA in General Management later at the University of Brighton, UK. He has been working in semiconductor equipment manufacturing for over 20 years.

Zine Bouhamri Yole

Zine Bouhamri, PhD
Technology & Market Analyst, Yole Devéloppement

As a Technology & Market Analyst, Displays, Zine Bouhamri, PhD, is a member of the Photonics, Sensing & Display division at Yole Développement (Yole).

Zine manages the day to day production of technology & market reports, as well as custom consulting projects. He is also deeply involved in the business development of the Displays unit activities at Yole.

Previously, he was in charge of numerous R&D programs at Aledia. During more than three years, he developed strong technical expertise as well as a detailed understanding of the display industry.

Zine holds an Electronics Engineering Degree from the National Polytechnic Institute of Grenoble (France), one from the Politecnico di Torino (Italy), and a Ph.D. in RF & Optoelectronics from Grenoble University (France).” He is also an author and co-author of several papers and patents.


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