Part of the Oxford Instruments Group


High yield manufacturing with our proprietary solutions for high-uniformity surface relief gratings.

Precision & Scalability

Whilst many technologies have been considered to deliver truly immersive AR experience, the waveguide approach has been favoured by major players such as Microsoft Hololens and Vuzix because of its ability to achieve a high field of view.

We have many years of expertise in etching the slanted feature on large areas. Our solutions are designed to deliver the manufacturing quality required for surface-relief gratings. We support manufacturers in reaching optimum optical efficiency with a range of slanted angle available.

We have many years of expertise in developing solutions for slanted gratings. Our solution delivers market-leading uniformity for wafer sizes up to 200mm.


Solutions for SRGs

  • High yield on large uniform areas
  • Angle >45° enables high-efficiency grating couplers
  • Process flexibility for a range of device designs

Unique Benefits

  • Precise definition of grating angle with highly symmetrical features
  • Scalability demonstrated over 200mm wafer area
  • Highly uniform etching for a range of grating angles, using innovative Oxford Instruments technology (patent pending)

Our expert solutions for mask opening, grating etch and surface treatment.

High-yield Manufacturing

Our advanced plasma processing solutions – achieved with ICP Etching, RIE and Ion Beam Etching – can handle wafers up to 200mm in size for high-volume production of AR devices. Our Ionfab system for IBE has been configured for optimum uniformity on 200mm wafer size.

Our proprietary ion beam technology and patent filed grid design allow us to produce standard 45° gratings with excellent precision. Our processing capability covers various materials such as Si and SiO2.

Cluster configuration options are available, using a field-proven, highly-reliable vacuum transfer robot for mask etching and AR coating modules.

Global after-sale support, include warranties and support contracts, ensure you achieve high uptimes. Our teams can be made available to you 24/7 worldwide either in-person or via a remote link. Our spares are available in strategic locations to enable a quick response. To find out more, take a look at our comprehensive Service & Support Options.


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