Semiconductor fabrication is a complicated process which requires precise control and analysis to maximise device performance. Here in Oxford Instrument, we work across multiple business units to offer solutions in semiconductor fabrications, characterization, and failure analysis.
This webinar will show how we can help you manufacture high quality semiconductor devices using etch and deposition techniques. We will then explore innovative imaging and analysis techniques to understand and confirm that the device contains the desired properties. Finally, we will cover techniques used to identify device defects and analyse device failures.
The webinar includes the following key learning points:
Continuous downscaling of semiconductor technology nodes impose ever more stringent requirements on metrology and failure analysis tools.
In this talk, we will cover how atomic force microscopes (AFMs) can be used in process control, defects identification, and in the R&D of new materials. We will demonstrate how AFMs’ unmatched sub-nanometer resolution and wide variety of electrical measurement modes make it an essential characterization tool in present and future devices.
Dr Ted Limpoco is an Applications Scientist at Oxford Instruments Asylum Research. He has over 10 years of AFM experience in nanoelectrical, nanomechanical, and nanotribology techniques.
He was previously a postdoctoral fellow at the University of Illinois at Urbana-Champaign and has a PhD in chemistry from the University of Florida.