We will show how we can help you manufacture high-quality semiconductor devices using Etch and Deposition techniques.
Explore innovative imaging and analysis techniques to understand and confirm that the device contains the desired properties. Finally, we will cover techniques to identify device defects and analyse device failures.
You will learn:
This webinar is ideal for those involved in semiconductor device projects, applications and processes, quality control and failure analysis, prototype and R&D.
Continuous downscaling of semiconductor technology nodes impose ever more stringent requirements on metrology and failure analysis tools.
In this talk, we will cover how atomic force microscopes (AFMs) can be used in process control, defects identification, and in the R&D of new materials. We will demonstrate how AFMs’ unmatched sub-nanometer resolution and wide variety of electrical measurement modes make it an essential characterization tool in present and future devices.
Dr Ted Limpoco is an Applications Scientist at Oxford Instruments Asylum Research. He has over 10 years of AFM experience in nanoelectrical, nanomechanical, and nanotribology techniques.
He was previously a postdoctoral fellow at the University of Illinois at Urbana-Champaign and has a PhD in chemistry from the University of Florida.