Part of the Oxford Instruments Group

High-rate biased ALD: Introducing the PlasmaPro ASP

2 November 2023 at 3 pm GMT

About the Webinar

In this webinar, we introduce our groundbreaking new Atomic Layer Deposition system, the PlasmaPro ASP.

Atomic Layer Deposition (ALD) offers precise thickness control, tunable film properties, and excellent conformality. Combining ALD with high speed and increased deposition rates enables new use cases in superconducting quantum devices.

PlasmaPro ASP uses a unique source design to enable deposition rates on order of 20-200 nm/hour without compromising on film quality or conformality. These high deposition rates allow faster process development, high throughput, and thicker films. We will introduce the system and highlight recent process results for dielectrics and superconducting nitride films.

PlasmaPro ASP system

Plasma Pro ASP system


Meet the Presenter

Dr Russ Renzas

Dr Russ Renzas

Quantum Technology Manager

Dr Russ Renzas is the Quantum Technology Manager at Oxford Instruments Plasma Technology. Prior to joining Oxford Instruments, he was Director of Device Fabrication at a superconducting quantum computing company, Rigetti Computing. Dr. Renzas has over 15 years of experience in science with over 3,500 academic citations and two patents. He is based in Reno, Nevada. 

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