Growth & Characterisation of 2D materials
Chemical Vapour Deposition (CVD) & PECVD tools for growth of 1D/2D nanomaterials and heterostructures. The Nanofab delivers high performance growth of nanomaterials with in-situ catalyst activation and rigorous process control, with flexible temperatures up to 1,200°C.
Excellent uniformity with flexible temperatures up to 1200°C
Sample sizes up to 200mm
Vacuum load lock - Quick sample exchange
Optional liquid/solid source delivery system for growth of MoS2,MoSe2 and other TMDCs
Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.
Gas pod - incorporate extra gas lines and allow greater flexibility
Turbomolecular vacuum pump - offers superior pumping speeds and higher throughput
Optical end point detectors - an important tool for achieving optimal process results
TEOS liquid level sensing - level sensing is achieved using ultra sonic level sensors fitted to the TEOS canister
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