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Part of the Oxford Instruments Group
Oxford Instruments provides services from R&D start-up to fab expansion, from pilot lines to mass production. Whatever your needs we have a service package to ensure your system and lab or fab are operating at peak performance.
To ensure continued optimal performance of your tool, this support package has been designed specifically for customers using their own on-site technical team to maintain their equipment and includes invaluable support provided remotely by Oxford Instruments Plasma Technology’s highly-skilled experts.
We provide support through innovative platforms to resolve smoothly the technical issues, using Oxford Instruments Live Assist and TeamViewer. The remote support is available during normal business hours 08:00 - 17:00 from Monday to Friday.
FIND OUT MORE ABOUT REMOTE SUPPORTOur Self Sufficiency packages give you the freedom to manage and maintain your system using your own engineers – with a little help from us when you need it.
If you want to take care of your equipment inhouse, our self-sufficiency package gives you the in-depth training required to maintain uptime with access to help desk support, discounted spares and engineering time.
This package is suitable for Universities, Institutions and pilot R&D production who have engineering support on-site but require maintenance training for Engineering teams.
DOWNLOAD BROCHUREThe Plus package has all the features of Self Sufficiency enhanced with additional training services, fast help desk access and a number of guaranteed onsite visits from our highly experienced field service engineers.
Our Service Support Agreements provide access to our expert help desks, field service engineers and spare parts to ensure that uptime, cost of ownership and productivity stay at an optimal level if you don't have in-house engineering support.
The Priority Support package gives peace of mind at minimal investment knowing that access to the help desk and a number of engineer visits within 5 days can be accessed.
This package is suitable for customers who require access to our helpdesk and limited on-site support with the option of including spare parts. Customers with single chamber products such as Ion Beam, PlasmaPro 100 etch and deposition tools typically purchase this agreement.
This service agreement will follow on from your warranty period and will ensure continued optimal performance of your tool. Investing in this package provides peace of mind that access to Oxford Instruments is readily on hand.
Offering unlimited access to our helpdesk and field service engineers, the Production Critical package is for those who require a higher level of guaranteed support for a greater level of uptime with the option of including spare parts.
Customers with PlasmaPro single chamber and multi-chamber clusters typically purchase this agreement. This service agreement automatically enhances the warranty period to the same production critical response times.
REMOTE SUPPORT |
SELF SUFFICIENCY |
SELF SUFFICIENCY PLUS |
PRIORITY SUPPORT |
PRODUCTION CRITICAL | ||||
Duration |
12 months from end of warranty period |
24 months from acceptance or 90 days from delivery |
12 months from end of warranty period |
24 months from acceptance or 90 days from delivery | ||||
Upgraded warranty |
✔ |
✔ | ||||||
Training |
1 credit |
2 credits |
2 credits | |||||
Technical Help Desk opening hours |
Normal office hours: 08:00-17:00 Monday-Friday | |||||||
Technical Help Desk response time |
Within 48 hours |
Within 24 hours |
Within 4 hours |
Within 24 hours |
Within 4 hours | |||
Engineer site visits |
Remote support Toolkit sent in advanced of PM |
10% discount for engineer site visit |
Up to 2 visits. Engineer prioritised on-site within 2 working days |
Up to 2 visits. Engineer prioritised on-site within 5 working days. 10% discount for further engineer visits |
Unlimited visits. Engineer prioritised on-site within 2 working days | |||
Preventative Maintenance |
1 PM Kit / module with dedicated engineer connected remotely |
✔ |
✔ |
✔ |
✔ | |||
Parts (not including Consumables) |
Optional extra |
Optional extra | ||||||
Discount on all spares |
10% discount |
10% discount |
15% discount |
10% discount |
15% discount | |||
Software Help Desk support |
10% discount |
10% discount |
Normal office hours: 08:00-17:00 Monday-Friday | |||||
Software Help Desk response time |
4 hours |
24 hours |
4 hours | |||||
REMOTE SUPPORT |
SELF SUFFICIENCY |
SELF SUFFICIENCY PLUS |
PRIORITY SUPPORT |
PRODUCTION CRITICAL | |
Duration |
12-36 months | ||||
Training |
1 credit |
2 credits |
2 credits | ||
Technical Help Desk |
Normal office hours 08:00-17:00 Monday-Friday | ||||
Technical Help Desk min. response time |
Within 48 hours |
Within 24 hours |
Within 4 hours |
Within 24 hours |
Within 4 hours |
Engineer site visits |
Remote support Toolkit sent in advanced of PM |
10% discount |
Maximum 2 visits with engineer on-site within 2 working days |
Maximum 2 visits with engineer on-site within 5 working days and 10% discount for further visits |
Unlimited visits with engineer on-site within 2 working days |
Preventative maintenance |
1 PM Kit / module with dedicated engineer connected remotely included |
✔ |
✔ |
✔ |
✔ |
Parts (not including consumables) |
Optional extra |
Optional extra | |||
Discount on all spares |
10% discount |
10% discount |
15% discount |
10% discount |
15% discount |
Software Help Desk |
10% discount |
10% discount |
Normal office hours 08:00-17:00 Monday-Friday and response within 4 hours |
Normal office hours 08:00-17:00 Monday-Friday and response within 24 hours |
Normal office hours 08:00-17:00 Monday-Friday and response within 4 hours |
Oxford Instruments is committed to providing comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of the tool.
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