Oxford Instruments, a leading provider of advanced plasma processing solutions,…
PTIQ is the next-generation control software for Oxford Instruments systems, designed to deliver intelligence, reliability, and ease of use for both research labs and volume production environments. Built for our PlasmaPro, Atomfab, and Ionfab platforms, PTIQ transforms process control into a smarter, repeatable, and more efficient experience.
Discover how PTIQ can transform your workflow.
PTIQ doesn’t just control—it thinks ahead.
Precision and compliance you can trust.
Powerful control made simple.
DiagnostIQs is an advanced diagnostic and maintenance system packed with powerful engineering tools to boost system uptime, streamline maintenance scheduling, and enhance operational efficiency:
Empower your team with intelligent diagnostics, calibration, and predictive maintenance.
Module |
Point of system sale |
Aftersales |
Engineer analysis mode and device calibration *2 |
✓ |
✓ |
Device fingerprinting |
✓ |
✓ |
Preventative maintenance warnings |
✓ |
X*3 |
Tool timeline |
✓ |
✓ |
Automatic log file export |
✓ |
✓ |
DiagnostIQs user training, including manual data API |
✓ |
✓ |
Notes: 1. All modules activated by renewable annual licence key 2. Free for PTIQ customers purchasing a new Service Support contract. 3. Currently unavailable as an aftersales upgrade. | ||
This module gives engineers and lab managers the tools they need for in-depth analysis and precise calibration, keeping systems running at peak performance.
Monitor and control every aspect of your system with advanced fingerprinting capabilities:
This module features the accumulator function, which:
Note that the Preventative Maintenance Warnings module is not currently available as an upgrade to older existing systems. Also note that legacy PCx software only tracks RF hours and wafer counts – PTIQ takes it further by monitoring and recording all process related parameters.
A Gantt chart-style view of tool activity for process engineers and lab managers, plus logging of tool states (tool up/down) for better operational insights.
Automate export of recipe run data in CSV or other formats and integrate with external applications via PTIQ’s Web API for advanced analytics and integration.
Includes Manual Data API and full access to dedicated training materials and on-hand support for the licence duration.
Connect Oxford Instruments equipment to your factory host controller via SECS/GEM for full compatibility with automated semiconductor manufacturing environments.
New features are coming to enhance functionality and efficiency, including even more advanced measurement, analysis, and process reporting features, for deeper insights and smarter decision-making. In addition, there will be new features released to automate backup tasks to secure and improve data management, streamline workflows, and boost performance.
Unlock the full potential of PTIQ with advanced software options.
From legacy to leading-edge – seamless upgrade paths for every requirement.
If you’re running legacy PC2000 or PC4500 software, now is the time to future-proof your systems. PTIQ delivers next-generation control, improved responsiveness and scalability, and an intuitive user experience designed for both research flexibility and production throughput reliability.
See how PTIQ combines intelligence, reliability, and intuitive design to transform your workflow. You can request a demo and discover why leading fabs and research labs are making the switch.
Ready to unlock our most advanced process control capabilities?
If you have any questions regarding PTIQ, be sure to visit our FAQ page for quick answers to commonly asked queries.