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Introducing PTIQ

intelligent, reliable, and intuitive software control for research and production

Featuring DiagnostIQs

Expert-level diagnostics, calibration, and predictive maintenance tools for maximum uptime

Featuring AnalytIQs

Advanced statistical analysis of log data for smarter decisions and trend tracking

Featuring SECS/GEM Integration

Seamless factory host connectivity for automated fabs

PTIQ:

Intelligent, reliable, and intuitive software control for research and production

PTIQ is the next-generation control software for Oxford Instruments systems, designed to deliver intelligence, reliability, and ease of use for both research labs and volume production environments. Built for our PlasmaPro, Atomfab, and Ionfab platforms, PTIQ transforms process control into a smarter, repeatable, and more efficient experience.

Discover how PTIQ can transform your workflow.

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Why PTIQ?


Three core benefits that matter:

Intelligent


PTIQ doesn’t just control—it thinks ahead.

  • Proactive readiness: visual indicators predict process readiness, helping prevent issues before they occur.
  • Calibration & diagnostics: advanced tools for fault finding, device fingerprinting, and in-situ calibration keep systems performing at their peak.
  • Data depth: millisecond-level accuracy and 1,000-point logging deliver actionable insights for process optimisation and repeatability.
  • Smart scheduling: fully-programmable and automated multi-cassette load/unload sequencing.

Reliable


Precision and compliance you can trust.

  • Ultra-low latency: lightning-fast responsiveness ensures ultimate control and stability.
  • High sampling rate: capture detailed process data for accurate analysis and decision-making.
  • Industry standards: SEMI E95-compliant interface guarantees compatibility and reduces training time.
  • Future-ready architecture: scalable design evolves with your processes, ensuring long-term reliability.

Intuitive


Powerful control made simple.

  • Multi-user profiles: safe, error-free operation tailored for operators, engineers, and maintenance teams.
  • At-a-glance interface: critical data delivered with minimal clicks for maximum efficiency.
  • Touchscreen compatible: designed for modern cleanroom environments, including yellow-light spaces.

PTIQ gallery:

Images of our intelligent, reliable, intuitive software in action

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Advanced software options

PTIQ goes beyond control—unlock deeper intelligence with optional modules:

DiagnostIQs

Deep diagnostics. Total control. 

DiagnostIQs is an advanced diagnostic and maintenance system packed with powerful engineering tools to boost system uptime, streamline maintenance scheduling, and enhance operational efficiency:

  • Enhances efficient and effective system maintenance and troubleshooting.
  • Drill down into the heart of your electronics for complete system control.
  • Intelligent automation for monitoring, diagnostics, calibration, and maintenance.

DiagnostIQs modules: precision tools for engineers and lab managers

Empower your team with intelligent diagnostics, calibration, and predictive maintenance.

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Module

Point of system sale

Aftersales

Engineer analysis mode and device calibration *2

Device fingerprinting

Preventative maintenance warnings

X*3

Tool timeline

Automatic log file export

DiagnostIQs user training, including manual data API

Notes:

1. All modules activated by renewable annual licence key

2. Free for PTIQ customers purchasing a new Service Support contract.

3. Currently unavailable as an aftersales upgrade.

DiagnostIQs modules – features and benefits:

Engineer analysis and device calibration

Deep analysis. Precise calibration.

This module gives engineers and lab managers the tools they need for in-depth analysis and precise calibration, keeping systems running at peak performance.

  • Full PLC I/O monitoring and direct device control
  • Fault-finding, calibration, and performance analysis
  • In-situ calibration of analogue levels, setpoints, and readbacks
  • PLC fingerprinting continually monitors module communications and will flag an alarm should a PLC fault develop

Device fingerprinting

Precision powered insight.

Monitor and control every aspect of your system with advanced fingerprinting capabilities:

  • Performance tracking for lag and response times to predict potential maintenance requirements
  • Trend analysis for proactive component replacement and system process performance.

Preventative maintenance warnings

Minimise System Downtime.

This module features the accumulator function, which:

  • Tracks device usage by actuations, state time, and consumption (volume, energy) relating to component accumulator values.
  • Tracks component usage and device runtime for maintenance planning, allowing warnings to be generated when device usage exceeds a set value or an amount of time has passed.
  • Reset values when replacing components or devices to reflect true age and usage of each point of potential risk/failure.

Note that the Preventative Maintenance Warnings module is not currently available as an upgrade to older existing systems. Also note that legacy PCx software only tracks RF hours and wafer counts – PTIQ takes it further by monitoring and recording all process related parameters.

Tool timeline

Visualise activity. Optimise productivity.

A Gantt chart-style view of tool activity for process engineers and lab managers, plus logging of tool states (tool up/down) for better operational insights.

Automatic log file export

Your data. Delivered exactly where you need it.

Automate export of recipe run data in CSV or other formats and integrate with external applications via PTIQ’s Web API for advanced analytics and integration.

User support for DiagnostIQs

Always‑on expert support.

Includes Manual Data API and full access to dedicated training materials and on-hand support for the licence duration.

Ready to unlock DiagnostIQs? 

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AnalytIQs

Powerful datalog statistical analysis for smarter decisions and fault-finding process drift 

  • Filter by module, recipe, step, and phase to focus the analysis
  • Select parameters to focus and track over time
  • Create reusable analysis tasks to track modules and recipes over time, visualise trends, and export results
  • Compute core statistics across runs: minimum, maximum, span, average, standard deviation, standard error
  • Visualise trends, add comments, and drill down into original logs within PTIQ
  • Export to CSV and reload saved display options for consistent reporting.
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SECS/GEM factory host connection

Seamless integration for automated fabs

Connect Oxford Instruments equipment to your factory host controller via SECS/GEM for full compatibility with automated semiconductor manufacturing environments.

On the roadmap

New features are coming to enhance functionality and efficiency, including even more advanced measurement, analysis, and process reporting features, for deeper insights and smarter decision-making. In addition, there will be new features released to automate backup tasks to secure and improve data management, streamline workflows, and boost performance.

Unlock the full potential of PTIQ with advanced software options. 

From legacy to leading-edge – seamless upgrade paths for every requirement.

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Why upgrade to PTIQ?


If you’re running legacy PC2000 or PC4500 software, now is the time to future-proof your systems. PTIQ delivers next-generation control, improved responsiveness and scalability, and an intuitive user experience designed for both research flexibility and production throughput reliability.

Flexible upgrade paths:

  • Upgrade with or without DiagnostIQs.
  • Site-wide plans for consistent user experience and long-term support.
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Experience PTIQ in action

See how PTIQ combines intelligence, reliability, and intuitive design to transform your workflow. You can request a demo and discover why leading fabs and research labs are making the switch.

Ready to unlock our most advanced process control capabilities?

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PTIQ FAQs

If you have any questions regarding PTIQ, be sure to visit our FAQ page for quick answers to commonly asked queries.

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