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Part of the Oxford Instruments Group
Whilst many technologies have been considered to deliver truly immersive AR experience, the waveguide approach has been favoured by major players such as Microsoft Hololens and Vuzix because of its ability to achieve a high field of view.
We have many years of expertise in etching slanted gratings on large areas and our solutions are designed to deliver the manufacturing quality required for high-yield.
We support manufacturers in reaching optimum optical efficiency with a range of slanted angle available.
Our Ionfab system for IBE has been configured for market-leading uniformity on 200mm wafer size.
Our proprietary ion beam technology and patent-filed grid design allow us to produce standard 45° gratings with excellent precision. Our processing capability covers various materials such as Si and SiO2.
Cluster configuration options are available, using a field-proven, highly-reliable vacuum transfer robot.
Superior process repeatability and low cost of ownership make the Ionfab tool an excellent system that is configurable from R&D to batch production.
Wafers are positioned on a substrate holder which is angled to face the ion source. The angle of the substrate holder can be adjusted to enabled angled etching.
Oxford Instruments is committed to providing a comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of your system.
Speak to our experts or request pricing information today.
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