Part of the Oxford Instruments Group
SECS GEM upgrade

Connect your plasma processing tools to your SECS GEM factory automation software

  • Enable your plasma tools to be incorporated into your SECS GEM HOST software scheme
  • Monitor and control the product and tool status for each tool
  • Allows the tool to be fully included in all your current factory automation functions such as SPC, Preventative Maintenance Scheduling, Event notification etc

SECS GEM upgrade features:

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