Part of the Oxford Instruments Group
Internal Gas Pod Upgrade

Up to 4 lines can be added with an internal gas pod

Expand the capability of your tool - New processes possible by the addition of different gases*

This means that even if your external gas pod is at full capacity, you can add further gases to your tools and enable a broader range of processes or MFC flow ranges.

*Non-toxic gases only


  • Up to 4 extra gas lines
  • Additional to external gas pod lines
  • Compact installation
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  • Extra processes
  • Broader MFC flow ranges
  • Extra capacity

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