Part of the Oxford Instruments Group

IBD Systems

Our ion beam deposition products are chosen for their ability to produce deposited films with high quality, dense and smooth surfaces. Ion beam technology provides an exceptionally versatile approach to etch and deposition by offering a single tool and maximising system utilisation. Our systems have flexible hardware options including open load, single substrate load lock and cassette to cassette. System specifications are closely tuned to applications, enabling faster and repeatable process results.