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PSS Etching Using Innovative Plasma Processing Technology


The aggressive drive for improved Cost of Ownership within the LED industry has driven the innovation within Oxford Instruments plasma technology. Optimised plasma processing offers many ways to improve device output and reduce manufacturing costs, a double windfall.

This presentation describes the approaches taken to increase productivity in these processes, both by increasing the process rates and by increasing the number of wafers processed simultaneously.

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Meet the Presenter

Dr Mark Dineen

Dr Mark Dineen
Technical Marketing Manager, Oxford Instruments Plasma Technology

Dr Mark Dineen has over 20 Years of plasma processing experience. His more recent work includes applying this knowledge to a wide range of devices from semiconductor lasers to GaN-based RF devices.

Mark is now an Experienced Technical Marketing Manager with a demonstrated history of communicating complex technical ideas and scientific concepts to a varied audience. These technologies include ALD, ALE, CVD, ICP, PECVD and RIE plasma processing and cover how these can deliver device solutions to our customers.


Dr Young Huang

Dr Young Huang
Field and Lab Applications Manager, Oxford Instruments Plasma Technology

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